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  4. High scalability & high maintainability compact organic vapor deposition device HEX-ORCA [Ideal for R&D!]
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  • Dec 22, 2023
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Dec 22, 2023

High scalability & high maintainability compact organic vapor deposition device HEX-ORCA [Ideal for R&D!]

テガサイエンス テガサイエンス
The HEX system is a compact vacuum device with a minimum installation area of 60 cm square, designed to be introduced with a minimal configuration and capable of changing its configuration for multiple purposes according to shifts in research direction. It allows for easy configuration changes and functional expansions, similar to assembling blocks. The "HEX-ORCA" is an organic deposition device based on the multipurpose vacuum deposition device HEX system. It is equipped with the low-temperature organic deposition source ORCA. Additionally, various sample stages are available, including heating, water cooling, and rotation. The organic deposition device HEX-ORCA system is an ideal vacuum device for depositing low-temperature materials such as organic materials and polymers used in OLEDs. ◆ Standard Specifications ◆ - Multipurpose vacuum deposition device HEX system - Organic deposition source ORCA - 80L/s turbo pump and scroll pump - Full-range vacuum gauge - Viewport panel - Fixed water-cooled sample table - DC power supply for ORCA - Film thickness gauge (QCM) - Manual shutter ◆ Upgrade Options (Examples) ◆ - Rotating water-cooled sample table - Automatic shutter - Additional organic deposition sources ORCA and power supply *Please feel free to contact us for more details.
Multi-purpose vacuum deposition device HEX system
Multi-purpose vacuum deposition device HEX system
Organic Vapor Deposition Source ORCA
Organic Vapor Deposition Source ORCA
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Tegascience_Multipurpose Vacuum Deposition Device HEX System
Compact vacuum deposition device with excellent versatility and customizability
Tegascience_Organic Deposition Source ORCA
Organic deposition source for HEX system

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HEX-main2 550x550.png

Compact! Simultaneous deposition! High expandability! 'Vacuum Deposition Equipment - HEX Series'

A versatile vacuum deposition device that allows for flexible configuration changes like assembling blocks | Sputtering, resistance heating deposition, electron beam deposition, organic deposition.

The HEX system features a unique "modular structure." By exchanging the panels that make up each face of the hexagonal prism-shaped chamber, you can freely change the number and arrangement of ports. As a result, you can easily modify the configuration and expand functionality, much like assembling blocks, in response to changes in research direction. The HEX system is a compact and highly expandable vacuum deposition device that fills the gap between benchtop systems and UHV systems, based on a new concept. ◆ The "modular structure" allows for flexible changes to the system configuration ◆ Supports sputtering, resistance heating deposition, electron beam deposition, and organic deposition ◆ Supports simultaneous film formation from multiple sources ◆ Compatible with sample rotation, heating, and water cooling ◆ Can be equipped with a film thickness monitor ◆ Compact design with a footprint of 60cm x 60cm ◆ Excellent expandability and maintainability ◆ Compatible with glove boxes (for lithium-ion batteries, etc.) For more details, please refer to the catalog available for download as a PDF. If you have any questions, please feel free to contact us.

  • Sputtering Equipment

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Multi-purpose vacuum deposition device sputtering source

Multi-purpose vacuum deposition device HEX system RF & DC sputtering source

This is a sputtering source for the multi-purpose vacuum deposition device HEX/HEX-L. It can be used in DC mode when the target is a conductor and in RF mode when the target is an insulator. With a gas hood as standard equipment, it is possible to increase the pressure near the target surface while keeping the chamber pressure low during film formation. Quick-release connectors are used for the connections of cooling water piping and gas piping, allowing for easy installation and removal of the piping without the need for tools. The Fission source can be fixed to the chamber with four butterfly nuts, eliminating the need for tools during installation and removal. It also supports reactive sputtering, enabling the deposition of oxides and nitrides. Up to three deposition sources can be installed on the HEX and up to six on the HEX-L, allowing for the deposition of multilayer films and compound films.

  • Sputtering Equipment

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Multi-purpose vacuum deposition device with resistance heating deposition source.

Resistance heating evaporation source for the multi-purpose vacuum deposition device HEX system.

This is a resistance heating evaporation source for the multi-purpose vacuum deposition device HEX/HEX-L. The resistance heating evaporation method is the most common vacuum deposition process. Materials are placed in a boat-type or crucible-type heating container, and by passing current through the heating container, resistance heat is generated to heat the materials. Once the temperature of the heating container rises sufficiently, the materials inside begin to evaporate. The deposition rate can be controlled by the current. The advantage of the resistance heating evaporation device is that it does not use process gases. Therefore, it operates at high vacuum levels, resulting in deposited films containing very few impurities. The TES source is fixed to the chamber with four butterfly nuts. Additionally, the cooling water piping is connected via quick-release connectors, allowing for quick replenishment of materials or replacement of boats/filaments. Up to five TES sources can be installed on the HEX, and up to six on the HEX-L. They can also be used in combination with the sputter source Fission, the electron beam evaporation source TAU, and the organic evaporation source ORCA.

  • Sputtering Equipment

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Multi-purpose vacuum deposition device - Electron beam deposition source

Multi-purpose vacuum deposition device for HEX system with 1-source and 4-source electron beam deposition sources.

This is an electron beam evaporation source for the multi-purpose vacuum deposition device HEX/HEX-L. The TAU series is a "mini" electron beam evaporation source. By using TAU, the HEX system can be utilized as an electron beam evaporation device (EB evaporation device). The material is heated by applying high voltage to it and accelerating thermal electrons emitted from a filament located right next to it to collide with the material. Unlike large electron beam evaporation sources, it does not use electron beam deflection magnets. Each pocket of the TAU source is equipped with a "flux monitoring plate" as standard, which detects the slight ions contained in the vapor. The ion current value detected here is proportional to the deposition rate and is sensitive enough to precisely grow sub-monolayer films. The TAU-4, which is a simultaneous deposition model with four sources, has independent flux monitoring plates in each of the four pockets, allowing for monitoring of the deposition rate in each pocket during simultaneous deposition. The TAU source can deposit from either a rod or a crucible, depending on the material. We can suggest the optimal deposition method, so please feel free to contact us.

  • Sputtering Equipment

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Multi-purpose vacuum deposition device with organic deposition source

Organic deposition source for the multipurpose vacuum deposition device HEX system.

This is an organic deposition source for the multi-purpose vacuum deposition device HEX/HEX-L. By installing ORCA, the HEX system can be used as an organic material deposition device. The ORCA source actively cools the crucible. The balance between heating and cooling achieves excellent temperature stability and control. The crucible is made of a material with high thermal conductivity, preventing the occurrence of hotspots that could adversely affect the deposition rate. Alumina and graphite liners are also available. The temperature of the crucible is measured by a K-type thermocouple, allowing for more accurate temperature measurements than conventional contact thermocouples. ORCA comes with a power supply unit and a PID controller optimized for low-temperature operation. The ORCA source can be used in combination with sputter sources, electron beam deposition sources, and resistance heating deposition sources. The area around the crucible is covered with a cooled protective cap, minimizing thermal interference from adjacent sources.

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Multi-purpose vacuum deposition device sample stage for HEX

Multipurpose Vacuum Deposition Device HEX System Sample Stage | Fixed, Rotating, Rotating Heating, Rotating Water Cooling

This is a sample stage for the multi-purpose vacuum deposition device HEX/HEX-L. Choosing the correct sample stage is as important as selecting the right film formation method. The characteristics of the sample stage affect uniformity, morphology, and film composition. It accommodates samples with a maximum diameter of 4 inches for HEX and 6 inches for HEX-L. In addition to the standard fixed sample stage, rotating, rotating heated, and rotating water-cooled sample stages are available.

  • Sputtering Equipment

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Related catalog(2)

Vacuum Deposition Device HEX Series Product Catalog

Vacuum Deposition Device HEX Series Product Catalog

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Tabletop Nano Particle Deposition Device 'NL50'

Tabletop Nano Particle Deposition Device 'NL50'

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Hyper CLT flooring panel

Wooden CLT flooring for heat stroke prevention measures | Hyper CLT flooring

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In summer construction sites, it is important to improve not only breaks and hydration to prevent heatstroke but also the working environment itself. Particularly when using steel plates on temporary roads, delivery routes, heavy machinery work yards, and pedestrian pathways, the increase in surface temperature due to sunlight and glare can burden workers. Hyper CLT sheets are civil engineering materials that utilize wood CLT. As wooden sheets, they can be used as an alternative to steel plates, for mud prevention, ground protection, and ensuring work pathways. Due to the unique properties of wood, they can effectively reduce glare, making them a suitable material for improving summer site environments and addressing heatstroke risks. The 5×10 sheets weigh about 230 kg, and the 5×20 sheets weigh about 460 kg, making them lightweight and easy to handle even with small machinery, which helps reduce the burden of installation and removal. Additionally, using wood offers benefits such as noise reduction and CO2 fixation. As a registered technology with the Ministry of Land, Infrastructure, Transport and Tourism under NETIS "TH-250021-A," they can also be utilized as materials for innovative ideas, safety measures, and environmental considerations in public works. They are recommended for companies looking to make summer construction sites more worker-friendly. We also accept inquiries for consultations and requests for materials tailored to site conditions. Please feel free to contact us for pre-introduction consultations.

Jul 26, 2026

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Hyper CLT flooring panel

Civil engineering site considerate of the neighborhood | Hyper CLT flooring

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In civil engineering sites, there are many instances where temporary roads, access routes, material storage areas, and pedestrian pathways use wooden boards. In residential areas, near schools, hospitals, and stores, the noise from construction, glare, and the appearance of the site can affect the impression on nearby residents, so consideration for temporary materials is required. Hyper CLT boards are civil engineering materials that utilize wood CLT. As wooden boards, they can be used as an alternative to steel plates, for muddy ground measures, ground protection, heavy machinery scaffolding, and worker pathways. The unique texture of wood provides a softer impression compared to metal plates, contributing to the improvement of the site environment. Additionally, they can be used as materials for proposals that address neighborhood concerns and environmental considerations, such as reducing metal noise, suppressing glare, and fixing CO2. The 5×10 board weighs approximately 230 kg, and the 5×20 board weighs about 460 kg, making them lightweight and easy to handle even with small machinery. As a registered technology with the Ministry of Land, Infrastructure, Transport and Tourism under NETIS "TH-250021-A," they are also recommended for innovative ideas and safety measures in public works. We encourage you to consider creating civil engineering sites that take into account the surrounding area. We can also propose locations and quantities tailored to site conditions. Please feel free to contact us for material requests or consultations on implementation. They can also be utilized in urban construction and private projects. Don't hesitate to reach out.

Jul 25, 2026

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Fukuda's leak test, leak inspection, leak detection, leak test, integrity test.

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Fukuda Co., Ltd. has been pursuing leak detection for 60 years and is committed to advancing the future of leak testing. 【 Supporting Various Leak Tests: Air Leak Test / Gas Leak Test (Hydrogen Gas, Helium Gas) 】 We develop, manufacture, and sell leak testing equipment to inspect airtightness and sealing properties. We will propose the appropriate testers and devices for each inspection target. 【 Target Industries and Examples of Inspection Targets 】 - Automotive Industry: Engines, FC components, valves and piping, various parts - Electronic Components Industry: Smartphones, keyless switches, various small sensors - Pharmaceuticals / Food / Cosmetics Industry: Bottle containers, syringes, vials, eye drop containers, pillow packaging, PTP packaging We will propose the most suitable leak testers for each industry. 【 ISO Certification 】JIS Q 9001:2015 (ISO 9001:2015)

Jul 24, 2026

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We will be exhibiting at the International Frontier Industry Messe 2026 (Kobe) from September 3 (Thursday) to September 4 (Friday), 2026.

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Printed electrostatic sensors ⇒ We will solve your concerns regarding shape/design improvement and enhanced cleanliness/safety. Resistive membrane pressure-sensitive sensor film ⇒ Ultra-lightweight and ultra-thin design allows for load detection through curved surfaces. Proposal of new design technology ⇒ Since it is printed, we can propose product value with minimal investment. Unit ⇒ We will solve challenges with ASSY unit products centered around printing technology. With printing, molding, and assembly as our pillars, we conduct consistent manufacturing from planning to mass production, establishing a production system that meets diverse needs. We will have various demo machines and samples prepared on the day, so we kindly ask you to visit us. Exhibition: International Frontier Industry Messe 2025 (Location: Kobe) Date: September 3 (Thursday) - September 4 (Friday) Venue: Kobe International Exhibition Hall (Location: Kobe) Our exhibition booth: P-86 Event overview: https://www.kobemesse.com/outline/

Jul 24, 2026

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Hyper CLT flooring panel

Impressing the site with the presence of wood | Hyper CLT flooring

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In civil engineering sites, there are many instances where temporary roads, access roads, heavy machinery work yards, and material storage areas use ground plates. While conventional steel plates are practical, they can sometimes fail to leave a lasting impression when it comes to the appearance of the site and conveying the company's initiatives. Hyper CLT ground plates are civil engineering materials that utilize wood CLT. As ground plates with the texture of wood, they can be used as a substitute for steel plates, for mud prevention, ground protection, and ensuring pedestrian pathways. By introducing them in visible areas such as site entrances, morning assembly locations, and around break areas, it becomes easier to create an impact that differs from traditional sites. The 5×10 plate weighs about 230 kg, and the 5×20 plate weighs about 460 kg, making them lightweight and easy to handle even with small machinery, which helps reduce construction burdens. They also offer advantages such as glare reduction, noise reduction, and environmental considerations unique to wood, making them suitable for innovative public works projects. Registered as a Ministry of Land, Infrastructure, Transport and Tourism NETIS technology "TH-250021-A," they are recommended for companies aiming to create a distinctive impression at their sites. We can also provide consultation for small lot introductions and suggest usage methods tailored to site conditions. Why not add a clear change to your civil engineering site with these new wooden ground plates?

Jul 24, 2026

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