Multi-purpose vacuum deposition device sputtering source

The HEX system is a compact vacuum device with a minimum installation area of 60 cm square, designed to be introduced with a minimal configuration and capable of changing its configuration for multiple purposes according to shifts in research direction. It allows for easy configuration changes and functional expansions, much like assembling blocks. The 'HEX-Fission' is a sputtering device based on the multipurpose vacuum deposition device HEX system. It is equipped with the sputtering source Fission and supports both DC sputtering and RF sputtering. It is capable of simultaneous deposition using up to three sputtering sources. ◆ Standard Specifications ◆ - Multipurpose vacuum deposition device HEX system - Sputtering source Fission - 80L/s turbo pump and scroll pump - Full-range vacuum gauge - Viewport panel - MFC controller - Fixed sample table - DC power supply - Film thickness gauge (QCM) - Manual shutter ◆ Upgrade Options (Examples) ◆ - Rotating heated sample table - RF power supply - Automatic shutter - Additional sputtering sources and power supplies *Please feel free to contact us for more details.

The HEX system is a compact vacuum device with a minimum installation area of 60 cm square, designed to be introduced with a minimal configuration and to allow for flexible reconfiguration according to changes in research direction. It can be easily modified or expanded in functionality by assembling blocks like a construction set. The 'HEX-TES' is a resistance heating deposition device based on the multifunctional vacuum deposition device HEX system. It is equipped with a resistance heating deposition source, TES. This vacuum deposition device is suitable for simple metal film deposition for electrical contacts, solar cells, and semiconductor applications. The resistance heating deposition device is characterized by its robustness, ease of use, and low cost of consumables. It can accommodate up to three film deposition sources, allowing for combinations with other deposition sources such as electron beam deposition sources. ◆ Standard Specifications ◆ - Multifunctional vacuum deposition device HEX system - Resistance heating deposition source TES - 80L/s turbo pump and scroll pump - Full-range vacuum gauge - Viewport panel - Fixed sample table - 600W power supply for TES source - Film thickness gauge (QCM) - Manual shutter *Please feel free to contact us for more details.*

The HEX system is a compact vacuum device with a minimum installation area of 60 cm square, designed to be introduced with a minimal configuration and capable of changing its setup for multiple purposes according to shifts in research direction. It allows for easy configuration changes and functional expansions, much like assembling blocks. The 'HEX-TAU' is an electron beam deposition device based on the multipurpose vacuum deposition device HEX system. It is an optimal vacuum device for depositing high melting point materials, metals, or insulators. It is particularly suitable for applications that require the deposition of very thin films with high control and reproducibility. ◆ Standard Specifications ◆ - Multipurpose vacuum deposition device HEX system - Electron beam deposition source TAU-S or TAU-4 - 80L/s turbo pump and scroll pump - Full-range vacuum gauge - Viewport panel - Fixed sample table - 250W power supply for TAU source - Film thickness gauge (QCM) - Manual shutter ◆ Upgrade Options (Examples) ◆ - Rotating heated sample table - 500W power supply for TAU - Automatic shutter - Additional electron beam deposition sources and power supplies *Please feel free to contact us for more details.*

The HEX system is a compact vacuum device with a minimum installation area of 60 cm square, designed to be introduced with a minimal configuration and to allow for versatile configuration changes in response to shifts in research direction. It can be easily modified or expanded in functionality by assembling blocks, much like building with construction toys. The multipurpose vacuum deposition device, HEX system, can be integrated into new or existing glove boxes. It is ideal for anaerobic film deposition experiments, such as those involving lithium-ion batteries. Only the sample table part of the HEX system enters the glove box, while the chamber part is fixed in a suspended manner at the bottom of the glove box, allowing for easy sample exchange and system maintenance from the atmosphere side. The HEX system can accommodate up to three deposition sources, enabling the combination of sputtering sources, resistance heating evaporation sources, electron beam evaporation sources, and organic evaporation sources for film deposition. *For more details, please feel free to contact us.*