Low acceleration SEM - Usable as an electron source for measurement/analysis! Compact electron beam column that can be embedded.
The compact electron beam column "MINI-EOC" is an embedded electron beam column that uses a Schottky emitter and can be added to existing equipment. It can be applied mainly to measurements and analyses that require high current density and low acceleration (such as LEED (Low Energy Electron Diffraction), AES (Auger Electron Spectroscopy), EDS (Energy Dispersive Spectroscopy), and EELS (Electron Energy Loss Spectroscopy)). Please use it in combination with SPM (Scanning Probe Microscopy) that is compatible with ultra-high vacuum. 【Features】 ■ Low acceleration and high current density ■ Low leakage magnetic field due to the use of an electrostatic type ■ Compatible with ultra-high vacuum (baking temperature <150°C) ■ Space-saving installation possible (mounting flange CF114) *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications (Excerpt)】 ■ Acceleration Voltage: Up to 5000V ■ Probe Current: 3×10^-12 to 10^-8A ■ Minimum Beam Diameter: 10nm (at acceleration voltage = 5000V, beam current = 0.3nA, W·D = 8mm) ■ Applicable Vacuum Environment: Below 2×10^-3Pa ■ Maximum Baking Temperature: Below 150℃ ■ Mounting Type: CF114 Flange ■ Weight: Approximately 20kg *For more details, please refer to the PDF document or feel free to contact us.
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[Usage] ■ Function addition to existing equipment ■ Usable as a low-acceleration SEM / electron source for measurement and analysis *For more details, please refer to the PDF document or feel free to contact us.
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