アプコ Product Lineup

The "ABK-5" is a sample breaker that allows for easy breaking of samples prepared for cross-sectional observation with scribing processing. Simply set the scribed sample and slowly turn the breaking knob to break the sample, following a straightforward processing procedure. This product is used as an option for the cross-sectional SEM sample preparation system "AMC series." 【Features】 ■ Supports sample widths of up to approximately 5mm ■ Capable of breaking various semiconductor wafers *For more details, please refer to the catalog or feel free to contact us.

• Crusher
• Other physicochemical equipment

The "AMC-8000" is a breaking device that produces unpolished, short-time cross-sectional observation samples of various semiconductor plates such as silicon and GaAs, as well as glass materials like LCD substrates and masks. It employs a scribing process using a roller cutter combined with a dedicated breaking system, achieving unpolished and completely dry cuts. Air suction is not required, and the utility needed is only a 100V power supply. 【Features】 ■ Easy operation ■ Adoption of breaking system ■ High-precision cross-sectional sample production ■ No air suction required ■ Compatible with 100V utility *For more details, please refer to the catalog or feel free to contact us.

• Crusher
• Other physicochemical equipment

The "AMC-7800" is a breaking device designed to create cross-sectional samples for SEM observation of materials such as mask glass, silicon, SiC, liquid crystal substrates, and sapphire substrates. The operation is simple, requiring only five steps, and allows for the production of observation samples with beautiful fracture surfaces in a short amount of time. Additionally, it significantly improves work efficiency. 【Features】 ■ No polishing ■ Completely dry cutting ■ High-precision scribing mechanism ■ Skip scribing mechanism ■ Low running costs *For more details, please refer to the catalog or feel free to contact us.

• Crusher
• Other physicochemical equipment

The "AMC-7600" is a breaking device that uses tungsten carbide rollers to easily create high-precision cross-sectional samples for SEM observation. It adopts a high-precision scribing mechanism and a skip scribing mechanism, allowing for the acquisition of beautifully fractured surfaces in a short time. This product meets the needs of customers who want to easily create cross-sectional SEM samples. 【Features】 ■ Easy operation ■ Short time ■ No polishing ■ Completely dry cut ■ Low running cost *For more details, please refer to the catalog or feel free to contact us.

• Crusher
• Other physicochemical equipment

The "AIP-38" is a power supply for ion pumps equipped with secondary batteries. During power outages, long holidays, or transportation, it can maintain high vacuum and avoid failures or loss of evacuation time. We also accommodate special specifications such as changes to compatible models (connector shapes), output voltage changes (-4kV, -3kV, etc.), and changes to evacuation duration (battery capacity). 【Features】 ■ Can operate continuously for up to 7 days ■ Can drive up to 3 pumps simultaneously ■ Trickle charging function ■ Easy to move with caster wheels ■ Supports momentary power outages ■ Voltage and current monitoring ■ Safety circuit for high voltage output *For more details, please refer to the PDF document or feel free to contact us.

• Other pumps
• power supply

The compact secondary electron detector 'MINI-SED' is a scintillator-type detector that captures and amplifies reflected electrons and secondary electrons, outputting them as electrical signals. Its compact design allows for space-saving solutions. It can also be used as an additional function for existing equipment. We can accommodate special specifications such as short types (tip length: 50 mm) and thin types (tip diameter: φ10 mm). 【Features】 ■ Wide current detection range from pA to μA ■ Maximum response speed of 5 MHz ■ Compatible with ultra-high vacuum (baking temperature <150℃) ■ Can be installed in a space-saving manner (mounting flange CF70) *For more details, please refer to the PDF materials or feel free to contact us.

• Microscope
• Optical Experimental Parts

The "Low-Acceleration SEM Measurement/Analysis Power Unit" is the operating power supply for the compact electron microscope MINI-EOC. It can be stored in a JIS standard rack and offers stability. Additionally, each unit can be freely combined according to the application. 【Features】 ■ Can be stored in a JIS standard rack ■ Units can be combined according to the customer's needs *For more details, please refer to the external link page or feel free to contact us.

• Other semiconductor manufacturing equipment
• Image Processing Equipment
• Electron microscope

The high-performance wafer and mask breaking device "AMC Series" is designed to easily create cross-sectional samples for SEM observation using tungsten carbide rollers. The processing process involves teaching the scribing position while watching the monitor, and automatically starting the scribing. The observation section is automatically skipped, and the internal stress from the scribing is utilized to break the sample. The samples are cut out to be insertable into electron microscope sample holders, etc. The "AMC Series" allows for the quick and precise creation of cross-sectional samples. 【Features】 ■ Scribing with a minimum positional accuracy of ±2.5μm is possible ■ A breaking method utilizing the stress from scribing is adopted ■ Samples with clean cross-sections can be produced ■ Continuous setting of scribing pressure ■ Scribing is possible at a constant pressure even for curved samples *For more details, please refer to the PDF document or feel free to contact us.

• Semiconductor inspection/test equipment
• Microscope
• Other processing machines

The compact electron beam column "MINI-EOC" is an embedded electron beam column that uses a Schottky emitter and can be added to existing equipment. It can be applied mainly to measurements and analyses that require high current density and low acceleration (such as LEED (Low Energy Electron Diffraction), AES (Auger Electron Spectroscopy), EDS (Energy Dispersive Spectroscopy), and EELS (Electron Energy Loss Spectroscopy)). Please use it in combination with SPM (Scanning Probe Microscopy) that is compatible with ultra-high vacuum. 【Features】 ■ Low acceleration and high current density ■ Low leakage magnetic field due to the use of an electrostatic type ■ Compatible with ultra-high vacuum (baking temperature <150°C) ■ Space-saving installation possible (mounting flange CF114) *For more details, please refer to the PDF document or feel free to contact us.

• Other image-related equipment