Type up to 300mm - Spin Coating/Developing Cluster
Wafer-level packaging for mass production and 3D integration.
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basic information
【Features】 ■ For mass production wafer-level packaging and 3D integration ■ Photosensitive resins such as polyimide and Cyclotene, as well as thin/thick resist ■ Excellent performance in coating, baking, and developing for coating applications □ For more details, please refer to the catalog.
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Company information
Zeus Microtech is one of the world's leading suppliers of microfabrication equipment, boasting over 70 years of engineering experience in the semiconductor industry and its related markets. We offer a wide range of products and solutions for lithography, wafer bonding, and photomask processing in semiconductor backend processes, as well as associated micro-optics components. Zeus Microtech continues to provide equipment that offers excellent performance/cost-effectiveness, accommodates special specifications, and flexibly adapts to diverse and rapidly changing manufacturing environments in markets such as MEMS, LEDs, advanced packaging, three-dimensional stacking, power semiconductors, and nanotechnology.