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  6. Coating and Developing Equipment ACS300 Gen2

Coating and Developing Equipment ACS300 Gen2

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last updated:Feb 25, 2011

ズース・マイクロテック
ズース・マイクロテック
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Type up to 300mm - Spin Coating/Developing Cluster

Wafer-level packaging for mass production and 3D integration.

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16.jpg

Coating and Developing Equipment ACS300 Gen2

16.jpg
16.jpg
  • Related Link - http://www.suss.com/jp/products.html

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basic information

【Features】 ■ For mass production wafer-level packaging and 3D integration ■ Photosensitive resins such as polyimide and Cyclotene, as well as thin/thick resist ■ Excellent performance in coating, baking, and developing for coating applications □ For more details, please refer to the catalog.

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Zuse Microtech Co., Ltd. Product Information (English Version)

Zuse Microtech Co., Ltd. Product Information (English Version)

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SUSS Japan Seminar in 2012_1

The SUSS Japan Seminar in 2012 has concluded.

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On December 4, 2012 (Tuesday), we will hold the SUSS Japan Seminar in 2012 at the Hyatt Regency Tokyo (Shinjuku). This year, we will conduct two seminars in parallel: the Photomask Section "Mask Integrity Challenges – Path to NGL Production" and the 3D Section "Current Status and Trends in 3D Integration Technology." We sincerely invite you to participate. 【Date】December 4, 2012 (Tuesday) 【Location】Hyatt Regency Tokyo, 27F 【General Participation Fee】¥5,000 【Details and Registration Method】http://www.suss.com/jp.html ■ Photomask Section "Mask Integrity Challenges – Path to NGL Production" 【Time】10:00 - 17:10 【Capacity】100 people ■ 3D Section "Current Status and Trends in 3D Integration Technology" 【Time】10:30 - 17:10 【Capacity】100 people ■ Joint Reception 17:15 - 19:00

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Fully automatic bonding device for 300mm compatible 3D lamination XBC300

[Finished] On June 3rd (Friday), at the JIEP Advanced Implementation Technology Symposium (Tokyo Big Sight), we introduced the wafer process technology for 3D stacking/TSV formation by Zeiss Microtech.

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On June 3rd (Friday), at Tokyo Big Sight, we will introduce the wafer process technology for 3D stacking from Zeus Microtech at the JIEP Advanced Implementation Technology Symposium/Session 3A1 "New Implementation Technologies for Next-Generation 3D Packages" (9:30–12:30). Development of 3D stacked devices using TSV is progressing in fields such as CMOS image sensors and MEMS. We will present on the lithography, thin wafer handling (temporary bonding/debonding), and wafer bonding technologies necessary for 3D stacking/integration. In this seminar, experts from various fields will also give presentations on the latest technologies in 3D implementation and next-generation packaging. □ For more details, please contact us.

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ズース・マイクロテック

ズース・マイクロテック

Electronic Components and Semiconductors

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Zeus Microtech is one of the world's leading suppliers of microfabrication equipment, boasting over 70 years of engineering experience in the semiconductor industry and its related markets. We offer a wide range of products and solutions for lithography, wafer bonding, and photomask processing in semiconductor backend processes, as well as associated micro-optics components. Zeus Microtech continues to provide equipment that offers excellent performance/cost-effectiveness, accommodates special specifications, and flexibly adapts to diverse and rapidly changing manufacturing environments in markets such as MEMS, LEDs, advanced packaging, three-dimensional stacking, power semiconductors, and nanotechnology.

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