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  6. Reexam Supercritical Fluid CO2 Application Device

Reexam Supercritical Fluid CO2 Application Device

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last updated:Feb 09, 2022

レクザム 香川工場
レクザム 香川工場
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You can dry nano-level fine structures without breaking them!

Supercritical processing is a method for extracting three-dimensional structures, such as those processed by wet etching in MEMS, which are extremely fine and fragile. These structures can be deformed or destroyed by the surface tension that occurs at the liquid interface during natural drying or IPA drying. In a sealed chamber, supercritical CO2 is injected into wafers or similar items that are in a liquid immersion state with IPA, allowing for the discharge of IPA while maintaining a state without surface tension at the IPA interface, thus drying them without damage.

    Drying Equipment
SCRD6.jpg

Reexam Supercritical Fluid CO2 Application Device

SCRD6.jpg
SCRD6.jpg
  • Related Link - https://www.rexxam.co.jp/products/wash/

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basic information

【Features】 ○ No surface long-term deformation occurs, so there is no damage to the fine structure and no watermarks are present. ○ It can penetrate fine pores that liquids cannot enter. ○ High energy allows for the melting of oils. ● For more details, please refer to the catalog or contact us.

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P7

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Supercritical Fluid CO2 Application Device Product Catalog

Supercritical Fluid CO2 Application Device Product Catalog

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レクザム

レクザム 香川工場

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The "ophthalmoscope," which can be said to be synonymous with Rexam, is a medical device used in ophthalmology and optical shops to instantly measure hyperopia, myopia, astigmatism, and more. Even in modern times, where advancements in precision technology have progressed, manufacturers capable of producing ophthalmoscopes are a rare presence worldwide. About 20 years ago, a challenge began at the request of an eyewear processing equipment manufacturer, marking a history of researching and mastering technologies in fields such as optical science, image processing, and precision mechanical design, which were unknown to us. Today, the high quality of our products is recognized, and they are sold in 120 countries around the world. Furthermore, the optical science and image processing technologies acquired through the development of the ophthalmoscope are being utilized in the development of new Rexam products, such as tonometers, densitometers, substrate appearance inspection devices, and clean robots.

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