A mass spectrometry method that allows monitoring of gases generated by vacuum heating/warming at different temperatures, with high sensitivity for detecting hydrogen and water.
TDS is a mass spectrometry method that allows monitoring of gases generated by vacuum heating/ramping at different temperatures. The TDS spectrum represents temperature on the horizontal axis and ion intensity on the vertical axis. This enables comparison of the amount of gas released and the desorption temperatures. Additionally, due to the vacuum environment, hydrogen and water can be analyzed with high sensitivity. - It is possible to understand the relationship between the gases desorbed from the sample, the pressure, and the temperature at which they are generated. - Since only the sample can be heated, the background is low, allowing for high-sensitivity analysis of low-mass molecules such as hydrogen, water, oxygen, and nitrogen. - It is possible to estimate the composition of the gases generated from the sample and perform quantitative analysis (counting the number of molecules).
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basic information
■Heating Section The sample is placed on the stage and heated by irradiating infrared light from below the stage. Temperature control is performed using a thermocouple located on the stage side. It is also possible to measure the temperature on the surface side of the sample using a thermocouple on the upper side of the sample. ■Mass Analysis Section The gas generated by heating is ionized into positive ions due to collisions with accelerated electrons and is separated according to its mass-to-charge ratio.
Price information
The price varies depending on the measurement target, so please feel free to contact us.
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Applications/Examples of results
- Moisture management of interlayer dielectric films - Desorption of H2 - Confirmation of dry etching residues - Evaluation of wafer surface contamination, etc.
Detailed information
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Please consult with us first. ★ We will start with a proposal for an analysis plan ★ We can, of course, meet at your company for discussions. We will carefully explain the analysis results and leave no questions unanswered. Please contact us at 03-3749-2525 or info@mst.or.jp!
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We will hold a visiting seminar. ★ We offer free seminars with engineers visiting to meet customer needs ★ We will introduce analysis techniques and explain analysis data according to your requests. ◆ Example seminar content - A broad explanation of MST analysis methods - A detailed explanation of specific analysis methods from the principles - An explanation of the analysis data requested by the customer Please contact us at 03-3749-2525 or info@mst.or.jp!
Company information
MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!