High-temperature thermal CVD equipment of tubular furnace type suitable for various material development using hydrocarbon-based compounds such as graphene at universities and research institutions.
We have miniaturized the test pieces to allow for easy operation in producing small quantities and sizes, while simultaneously achieving significant cost reductions. Additionally, we have equipped them with pressure control functionality in the range of 5 to 100 Pa, which was previously considered difficult for small sizes, enabling support for a wider variety of processing patterns. Furthermore, for flammable gases based on hydrocarbons, we have safety devices such as equipment shutdown triggered by alarm detection and atmospheric gas dilution units. For more details, please download the catalog or contact us.
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【Features】 ○ Compact ○ Achieves cost reduction ○ Supports various processing patterns ○ Equipped with safety devices 【Main Specifications】 ○ Furnace core tube → Transparent quartz tube (heating temperature 100–1000℃) → Alumina tube (heating temperature 1000–1400℃) ○ Reaction gas supply: 2–60 sccm → (Hydrogen, methane, ethane, ethylene, acetylene, benzene, etc.) ○ Pressure control: 5–100 Pa ○ Measures for releasing flammable gases into the atmosphere → Dilution of exhaust with air below the flammable mixture range using an ejector ● For more details, please download the catalog or contact us.
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Company information
Currently, vacuum technology is showing significant expansion across various industrial fields, including space development, electronics, energy, physics and chemistry, electrical engineering, pharmaceuticals, food, optics, automotive, metals, and steel. These technologies have made substantial contributions at all stages, from research and development to production processes, in every sector of the industry. Furthermore, their results permeate every corner of our lives. At PHIL Sato Vacuum, we have continued to innovate as a vacuum equipment manufacturer for 75 years, developing component technologies that produce vacuum pumps, vacuum measuring instruments, and various vacuum parts, as well as a range of vacuum systems utilizing this vacuum technology, including vacuum drying, vacuum baking, vacuum heat treatment, vacuum deposition, vacuum film formation, ultra-high vacuum exhaust, vacuum injection, and vacuum impregnation. As a comprehensive vacuum manufacturer, we have always advanced research and development from the user's perspective. The corporate activities of PHIL Sato Vacuum, rooted in our "customer-first" principle, are based on our management philosophy that pursues the infinite possibilities of vacuum technology and believes that it is our mission to provide products that match user needs.
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