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  1. Home
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  6. High-Precision Wafer Crack Inspection Device "Super Macro SM75"

High-Precision Wafer Crack Inspection Device "Super Macro SM75"

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last updated:Aug 30, 2022

アローズエンジニアリング
アローズエンジニアリング
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Inspection in one shot for 300mm wafers in 1 second.

The high-precision wafer crack inspection device "Super Macro SM75" can inspect 300mm wafers in less than one second with a full-field one-shot, making it suitable for fully automated inspection lines due to its short inspection time. It is available with a lineup of small-field optical systems and can be applied to internal void inspections by using infrared light as an optional light source. In recent years, wafers have been becoming thinner, but this high-precision wafer crack inspection device can quickly inspect the entire wafer for chip cracks caused by the unevenness of BG processing, polishing marks, and stress. For more details, please download the catalog.

    Electron microscope
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High-Precision Wafer Crack Inspection Device "Super Macro SM75"

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  • Related Link - http://arrowseng.com/index.php?id=125
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basic information

【Features】 ○ Automatic inspection available ○ Standalone type also available ○ Manual inspection possible ○ Customizable slice level settings ○ Soma mark removal function ● For more details, please contact us or download the catalog.

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Applications/Examples of results

【Applications】 ○ Patterned wafer crack inspection ○ Bare wafer crack inspection ○ Wafer edge damage inspection ○ Evaluation of BG polishing marks ○ Evaluation of slurry ○ Residual stress in glass substrates ○ Evaluation of stress relief ○ Tension inspection of BG tape ○ Distortion and scratch inspection of compound wafers ○ Pulsation inspection of lenses and optical components ○ Stress distortion of various works due to pressure ● For more details, please contact us or download the catalog.

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Product catalog for the high-precision wafer crack inspection device "Super Macro SM75".

Product catalog for the high-precision wafer crack inspection device "Super Macro SM75".

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アローズエンジニアリング

アローズエンジニアリング

Testing, Analysis and Measurement

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Since our company's establishment in 1986, we have long been engaged in semiconductor-related businesses that support Japan's cutting-edge technology. On the hardware side, we have developed construction and manufacturing environments, including clean rooms. On the human resources side, we have focused on training semiconductor engineers and establishing a service system that can promptly respond to customer needs. Last year, we participated in SEMICON Japan for the first time, and by directly interacting with many industry stakeholders, we were able to learn again what is currently needed and what services should be created. At the same time, the morale within the company has been rising, and we are actively conducting sales activities. It is said that the Japanese economy is finally showing signs of recovery. However, even just looking at the semiconductor industry, the entry of overseas manufacturers and the significant improvement in technology and services are remarkable, so we aim to enhance our international competitiveness in our sales expansion. Not only domestically but also in response to the era of globalization, our role as a hub connecting North America and Asia, especially given our excellent airport access, will further increase.

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