【Demo units available for rental!】Both the loader and unloader can be operated by one person on the same side.
The automatic photoresist device is a machine that automatically performs resist spin coating, vacuum baking, alignment, and spray development from cassette to cassette. Of course, process selection is also possible. The loader and unloader can be operated by one operator from the same side. A multi-joint robot is used for transportation between processes. This machine is suitable for 200mm square substrates or φ300mm substrates. For more details, please contact us.
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basic information
**Features** - Automatic execution of resist spin coating, vacuum baking, alignment, and spray development from cassette to cassette. - Selection of processes is also possible. - Loader and unloader can be operated by one operator on the same side. - Transportation between processes uses a multi-joint robot. - Applicable to target work: 200mm square substrates or φ300mm substrates. **Specifications** - Dimensions (mm): W2300 × D2300 × H1850 - Loader: 1 cassette storage - Cup: SUS304 Teflon-coated - Dispenser: Pneumatic diaphragm type - Pressure tank: For resist bottles - Automatic cup cleaning: Acetone, bellows pump - Gas-liquid separation tank: SUS304 - Exposure machine: Optional - Development cup: SUS304 Teflon-coated - Baking furnace: Hot plate, vacuum chamber - Rotational speed: MAX 3000rpm - Motor: 400W AC servo motor - Transport mechanism: Multi-joint robot - Hanger: Edge clamp type - Baking: Three-stage hot plate, shuttle transport method - Unloader: 1 cassette storage ● For more details, please contact us.
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Company information
Japan Create has been challenging cutting-edge technologies to respond to the diversification of the semiconductor industry with high precision, labor-saving, and miniaturization. We seek infinite possibilities in high technology and create reliable know-how that matches user needs with our uniqueness. We will continue to strive towards high-level technology.
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