A cleaning machine that superimposes ultrasonic waves on a quartz oscillator to clean wafers and masks. It achieves low damage and high cleanliness.
■Cleaning semiconductor wafers by superimposing ultrasonic waves on a quartz vibrator By immersing the semiconductor wafer in a chemical solution and transmitting ultrasonic vibrations through quartz glass, the solution at the contact point vibrates, removing surface contaminants through its acceleration. ■Clean cleaning with minimal damage to semiconductor wafers By using quartz at the liquid contact point with the chemical solution, we achieve a clean cleaning process without the leaching or wear of rubber materials, compared to devices using rubber components like gaskets. ■Vibrator with cooling function By cooling the vibrator with gas (such as nitrogen), stable continuous operation without frequency fluctuations is possible. Additionally, cooling prevents rapid temperature changes, resulting in a longer lifespan.
Inquire About This Product
basic information
■Oscillator 【Model】W-357-1MQG-SKC 【Oscillation Mode】Single Frequency Oscillation 【Rated Output】12W 【Nominal Oscillation Frequency】1MHz 【Power Input】AC100V～240V Single Phase 50/60Hz 300VA 【Dimensions WxDxHmm】180×250×100 (excluding protrusions, including rubber feet) 【Weight】2.2kg ■Vibrating Body Nozzle 【Flow Rate】Not specified 【Total Length】159mm 【Chuck Part Dimensions】φ24mm 【Irradiation Area】24㎠ 【Weight】600g
Price range
P5
Delivery Time
※Please feel free to contact us.
Applications/Examples of results
■Removal of resist residue ■Removal of polymer after etching and ashing ■Cleaning of gate electrodes ■Cleaning after CMP
catalog（2）
Download All Catalogs
Company information
At Honda Electronics, since our founding, we have always focused on the development of new technologies as a research and development-oriented company. As we enter the 21st century, we aspire to be a market-creating company, utilizing the various ultrasonic core technologies we have cultivated over the years to contribute to societal development through collaboration with academia and cross-industry exchanges. Dolphins possess remarkable ultrasonic abilities bestowed upon them by the gods. As a company involved in ultrasonics, there is still much we can learn from dolphins. We are committed to continually striving for technological innovation with humility, while actively sharing information that brings happiness to everyone.