High Frequency Quartz Vibrator Type Cleaning Machine W-357-1MQG-SKC

A cleaning machine that superimposes ultrasonic waves on a quartz oscillator to clean wafers and masks. It achieves low damage and high cleanliness.

■Cleaning semiconductor wafers by superimposing ultrasonic waves on a quartz vibrator By immersing the semiconductor wafer in a chemical solution and transmitting ultrasonic vibrations through quartz glass, the solution at the contact point vibrates, removing surface contaminants through its acceleration. ■Clean cleaning with minimal damage to semiconductor wafers By using quartz at the liquid contact point with the chemical solution, we achieve a clean cleaning process without the leaching or wear of rubber materials, compared to devices using rubber components like gaskets. ■Vibrator with cooling function By cooling the vibrator with gas (such as nitrogen), stable continuous operation without frequency fluctuations is possible. Additionally, cooling prevents rapid temperature changes, resulting in a longer lifespan.

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