Particles of 0.15μm can be measured from photoresist solutions and SOG, etc.
Liquid Particle Counter KS-41A Measures particles from 0.15μm in photoresist solutions and SOG Robust support system with domestic manufacturing and maintenance
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basic information
●Measuring particle size range: 0.15 μm to 0.5 μm (simultaneous measurement of 10 particle sizes) ●Measuring particle sizes can be set arbitrarily ●Built-in liquid leak sensor outputs an alarm when a leak occurs inside the main unit
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Applications/Examples of results
Semiconductor exposure process resist and SOG usage line Chemical acceptance inspection line in semiconductor factories Shipping inspection line for resist and SOG manufacturers, etc.
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Company information
A group of acoustic measuring instruments such as sound level meters and vibration meters, particle counters essential for cleanliness management, seismic measurement systems including earthquake meters for disaster prevention and control, and further expanding product fields centered on welfare and environmental issues, contribute to the enhancement of social welfare, safe living, and technological innovation through a long accumulation of technology and continuous challenges to new technologies.