You can attach three types of targets simultaneously! It is possible to create a multilayer film.
The multi-compact coater "SVC-700TMSG/Adexcel" is a small film deposition device that generates plasma through direct current discharge using a magnetron cathode in a low vacuum environment. It sputters a metal target attached to the cathode with ions in the plasma, creating a thin film on the surface of the sample. Since three types of targets can be mounted simultaneously, it is possible to select targets in a vacuum and produce multilayer films. 【Features】 - Structure allows for optional installation of film thickness sensors, sample heating units, etc. - Can also be used as a resistance heating vacuum deposition device → Replace the exhaust unit with a resistance heating unit and connect a dedicated power supply. For more details, please contact us.
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basic information
【Basic Specifications (Excerpt)】 ○Discharge Type: DC Magnetron ○Discharge Control: Constant Current 30mA ○Pressure Control: Manual control via needle valve ○Process Time: Up to 15min/timer control ○Process Gas: Ar (Introduction Pressure below 0.1MPa) ○Process Gas Inlet: φ6mm quick connector (for Sinflex tube) ○Target Size: φ49mm, t0.5mm (maximum) ○Number of Target Mounts: 3 types ○Applicable Targets: →Au, Pt, Au-Pd, Pt-Pd, Ag, Pd, W, Ni, Mo, Cr, Ti, Al, Cu, Fe ○Sample Size: Maximum φ50mm ○Sample Selection: Stage rotation type ○Target/Sample Distance (TS): 20mm, 30mm, 40mm ○Target Selection: Shutter method ○Power Supply Method: Standalone power supply switchable (power panel operation) ○Exhaust System: Turbo Molecular Pump (TMP) 67L/s (N2), Oil Rotary Pump (RP) 20L/min ○Achievable Vacuum Level: Below 1×10⁻³Pa ○Vacuum Measurement: Combination type vacuum gauge (Ionization vacuum gauge + Pirani vacuum gauge) ●For more details, please contact us.
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P5
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The management philosophy is to "pioneer the future of research and development with core technology." Our motto is to provide those involved in research and development with what they need at the right time, while enhancing the "expandability of device functions" and offering a "variety of options." Additionally, leveraging our "agility," we strive daily to meet the diverse needs of our customers.