It is an automatic aligner that enables high-speed integration.
Model: NM1A-XX Frequency: 13.56MHz Power Input: 1kW Input Impedance: 50Ω Unbalanced Matching Mode: Automatic or Manual Switching Input Connector: HN Connector Output: Busbar Cooling: Water Cooling/Air Cooling Combined Matching Time: Within 0.5 Sec when using preset External Analog I/O: 0 to 10.0V External Serial Communication: RS232C/422/Device Net Power Supply: AC84V to 220V/DC24V (80VA)
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Model: NM1A-XX Frequency: 13.56MHz Power Input: 1kW Input Impedance: 50Ω Unbalanced Matching Mode: Automatic or Manual Switching Input Connector: HN Connector Output: Busbar Cooling: Water Cooling/Air Cooling Combined Matching Time: Within 0.5 Sec when using preset External Analog I/O: 0 to 10.0V External Serial Communication: RS232C/422/Device Net Power Supply: AC84V to 220V/DC24V (80VA)
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Semiconductor manufacturing equipment, etc.
Company information
RF Technologies has been involved in the development and design of high-frequency technologies since the time high-frequency power supplies began to be used in plasma processes, including "demonstration research," "material development," "surface modification," "semiconductor manufacturing," "FPD manufacturing," and "solar cells." Fortunately, we have had the opportunity for technical collaboration and exchange with academic researchers and major semiconductor manufacturing equipment manufacturers at the forefront of global technology. We have experienced many instances where the alignment of our technologies was essential to solving issues that overlap between areas that equipment manufacturers need to address and areas that power supply manufacturers need to resolve.
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