We are widely introducing vacuum device support and vacuum process products.
Maintenance Research Co., Ltd. was established in 2008 for the purpose of maintaining sputtering equipment manufactured by Materia Is Research Corporation in the United States. Maintenance Research aims to contribute to our customers' device production activities by providing reliable parts and technical services, including the replacement of discontinued parts, and offering repair alternatives for power supplies and robots, ensuring that your equipment operates stably and for a long time, along with the introduction of new vacuum process equipment. 【Business Activities】 - Sales of overseas vacuum process equipment and used vacuum process equipment from various manufacturers - Repair of vacuum equipment for semiconductors from various manufacturers - Repair of vacuum transport robots - Repair of power supplies from various manufacturers - Design and sale of parts for semiconductor equipment For more details, please contact us or download the catalog.
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【Products Offered】 ○ Ion Beam Etching ○ Ion Beam Sputtering ○ Ion Sputtering ○ Inline Sputtering Equipment ○ Optical Thin Film Deposition Equipment ○ Gas Cluster Ion Beam Equipment ○ Accelerated Neutral Atom Beam Equipment ○ Circular Sputtering Cathode ○ Rectangular Sputtering Cathode ○ Cylinder-type Sputtering Cathode ○ Various Targets for Sputtering ○ High Impulse Sputtering Power Supply ○ Pulse Power Supply for Arc Plasma ○ Pulse Power Supply for Plasma CVD ○ Maintenance ● For more details, please contact us or download the catalog.
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Maintenance Research introduces cutting-edge vacuum process equipment and aims to ensure that your equipment operates stably and for a long time by providing replacements for discontinued parts, power supplies, and repair alternatives for robots, among others. We contribute to your device production activities through the provision of reliable parts and technical services. At Maintenance Research Co., Ltd., our motto is customer satisfaction and peace of mind, and we will continue to strive for the enhancement of our technical capabilities. We sincerely ask for your continued patronage in the future.