Excellent uniformity of film thickness and impurity concentration. Atmospheric pressure CVD equipment that achieves high productivity and low cost.
The atmospheric pressure CVD device "AMAX800V" is a continuous atmospheric pressure CVD system compatible with φ200mm wafers, utilizing the reaction characteristics of monosilane gas to form insulating films such as USG, PSG, BPSG, and back surface protective films on silicon substrates. It achieves high throughput through improvements in the transport mechanism. The adoption of SiC trays minimizes heavy metal contamination, and stable process performance is achieved with less thermal aging. 【Features】 ○ High throughput ○ Excellent film formation characteristics ○ Maintenance-friendly ○ Reduced metal contamination (optional) For more details, please contact us or download the catalog.
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【Specifications】 ○Size: 1460mm(W) × 3830mm(D) × 2250mm(H) ○Film deposition rate: Up to 5000Å/min ○Particles: Increase of 15 or fewer with a size of 0.22μm or larger (after CVD deposition on 8-inch wafers) ○Gas types: SiH4-O2 (SiH4-O3 is available as an option) ○Online communication: Automated online communication can be supported with an additional computer as an option ○Film thickness uniformity (NSG): Both 2-head and 3-head configurations In-plane: ≦±3.5%, Between planes: ≦±2.5% ○Impurity concentration uniformity: Within ±3.0% for both in-plane and between planes ○Temperature: 350℃ to 430℃ (150℃ to 350℃ for ozone process) ○Compatible wafer size: 8 inches (Compatibility for both 8-inch and 6-inch wafer sizes is available as an option) ○Throughput: Up to 100 wafers/hour (at 5000Å) ●For more details, please contact us or download the catalog.
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Amaya Manufacturing Co., Ltd. has been developing and selling atmospheric pressure CVD (Chemical Vapor Deposition) equipment since 1970, focusing on atmospheric pressure CVD systems used for semiconductor manufacturing. In recent years, as a challenge to enter new fields, we have developed and sold high productivity atmospheric pressure CVD equipment for solar cell manufacturing. Moving forward, we will continue to work on developing new technologies and aim to be the only company specializing in atmospheric pressure CVD equipment.