A kit has been developed to modify the current FOUP load port for N2 purge functionality within 8 hours. There have been 3,000 units delivered.
Three types of purge: 1. Purge during loading 2. Purge during opening 3. Purge during unloading
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basic information
POINT: 1. Power: AC110V, 15A (One power socket is required for each port. The required capacity for the machine is 15A.) 2. Gas: XCDA tube: 3/8”, 6Kg/cm2 (In practice, it can be used up to 5Kg/cm2. 200L/min; one tube is drawn for each port.) 3. Exhaust: GEX, 3/8” (One 3/8 tube is drawn for each port.) 4. Communication: Ethernet (Only one network line needs to be drawn to the main machine to enable IP usage.) 5. Holes are required (For each L/P, it is necessary to drill holes in the circuit and pipeline front. Regardless of size, please confirm the position properly on site.)
Price range
Delivery Time
Applications/Examples of results
Over 3,000 units delivered.
Company information
Since its founding by our founder Yuuzou Torizuka in 1973, our company has continued its business activities with the motto of providing better products and services to satisfy our customers, faster and at lower costs. We aim to be a company that contributes to the global environment and the local community, and we strive to become a highly responsive company to meet all needs, with all employees working together towards this goal. We sincerely thank you for your continued support and ask for your further guidance and encouragement in the future.