We achieve excellent film thickness uniformity using a self-developed ion source.
Principle: DC-based Ion Milling Features: Simple and robust structure Quick response time (depending on the amount of cutting) Zero etching capability Simple maintenance with DC-based source (gridless, filamentless) Applications: Thickness adjustment of temperature compensation layers (SiO2) for SAW filters, thickness adjustment of LTO, AlN films, etc. Thickness and frequency adjustment of piezoelectric films such as AlN and LTO Thickness adjustment of other conductive and non-conductive films Delivery Record: Japan: Multiple units Overseas: Numerous units delivered
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basic information
It is a trimming device used in SAW, BAW filters, and other applications by the American company AMS.
Price range
Delivery Time
Applications/Examples of results
MEMS, SAW filter, FBAR
Company information
Matsubo provides services in two business areas: [Industrial Machinery & Information] and [Powder Technology], supported by a [Technical Center] backup system. Breaking away from the confines of a specialized machinery trading company, we have established a comprehensive service system to ensure our customers can use our products with confidence, ranging from consulting prior to implementation, engineering related to installation and localization, to maintenance and proposals for improvements and modifications after installation.
