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  6. Vacuum-compatible positioning table <VT>

Vacuum-compatible positioning table <VT>

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VT125VST−XY

last updated:Oct 13, 2016

メガトラスト MEGA-TECH Formations 豊玉事業所
メガトラスト MEGA-TECH Formations 豊玉事業所
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Vacuum-compatible positioning table <VT>

Our company conducts its own gas emission evaluations, so even when used in a high vacuum environment, there is minimal impact on other equipment within the chamber, allowing us to provide accurate specifications for vacuum applications.

    Other semiconductor manufacturing equipmentOther physicochemical equipmentAnalytical Equipment and Devices
VT125XY.jpg

Vacuum-compatible positioning table <VT>

VT125XY.jpg
VT125XY.jpg

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basic information

This is a general-purpose XY positioning stage compatible with a vacuum level of 5×10^-5 Pa. 【Features】 - Equipped with vacuum-compatible stepping motors (in-house manufactured) - Equipped with vacuum-compatible photo sensors (in-house manufactured) - Specific brands of vacuum grease can be designated; non-grease options are also available - High compatibility with general-purpose stages allows for a smooth transition from atmospheric to vacuum specifications. - Recommended for use in environments other than vacuum, such as high-temperature environments or those that are sensitive to outgassing. [Specifications] External dimensions: W188 × L188 × H38 [mm] Stroke: 25 [mm] for both XY axes ⇒ For more details, please inquire through the download. ⇒ For inquiries regarding vacuum-compatible products, estimates, etc., please contact us through the comments below.

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P3

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Vacuum-compatible positioning table <VT>

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メガトラスト

メガトラスト MEGA-TECH Formations 豊玉事業所

Testing, Analysis and Measurement

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Our company is committed to 'monozukuri' (manufacturing), nurturing and enhancing our technical capabilities. We utilize this to connect companies with specialized fields and strengths, aiming to create new innovations.

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