Vacuum-compatible positioning stage with sub-micron resolution and a range of 50mm.
It is driven using a stepping motor and ball screw, which provides excellent position holding capability. The built-in optical linear encoder detects the stage's position and performs full closed-loop control, resulting in high resolution and excellent position reproducibility. It has been treated for outgassing and can be used in a vacuum. It can operate within a range of 50mm with a resolution of either 50nm or 100nm (depending on the controller).
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basic information
Minimum resolution: 50nm (when using FC-411) : 100nm (when using FC-111) Maximum movement speed: 2mm/sec Stroke: 50mm Compatible controllers: FC-411 or FC-111 Compatible vacuum level: 10^-4 Pa ■For details, please request materials or download the catalog■
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Applications/Examples of results
The feedback stage system has been used in various fields in recent years. The typical areas of use include information and communication, optics, semiconductors, and biotechnology. Examples include: positioning during MEMS inspection, optical system delay stages, microscope stages, scanning electron microscopes, X-ray utilization technology, and ultra-fine processing. It is utilized in inspection devices and experimental equipment that require precise positioning and reproducibility.
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.
