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  6. Temperature sensor for ASM Epsilon

Temperature sensor for ASM Epsilon

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last updated:Apr 10, 2017

IBPテクノロジー
IBPテクノロジー
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New coating technology triples sensor lifespan! Achieves up to 45% cost reduction!

This time, we have adopted a new technology called "EtchDefender," developed by the U.S. company CONAX, which enables us to extend the lifespan of sensors up to three times longer than conventional ones by reducing foreign material adhesion on wafers, slowing down the etch rate, and decreasing the erosion rate! "EtchDefender" is a reliable technology that has been validated over several years in research institutions and manufacturing facilities of major wafer manufacturers. With this new coating technology, we can extend the lifespan of sensors and achieve significant cost reductions of 35-45%. *For more details, please refer to the catalog. Feel free to contact us as well.

    Board to Board ConnectorsTemperature and Humidity Control
IPROS6623915790976316947.png

Temperature sensor for ASM Epsilon

IPROS6623915790976316947.png
IPROS6623915790976316947.png

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**Features of EtchDefender** - **Reduction of Foreign Substance Adhesion to Wafers** There is no concern about surface peeling of quartz tubes, which can lead to contamination of wafers due to good adhesion to quartz. - **Durability** There is no corrosion or outgassing even under high vacuum and high temperature conditions. - **Slowing of Permeation Rate** Dramatically slows down the permeation of quartz sheaths in epitaxial equipment under high temperature environments of 900°C or higher. - **Slowing of Erosion Rate** Suppresses erosion caused by corrosive gases sprayed at high concentrations onto quartz tubes, particularly contributing to the long life of center TC. - **Long Life** This coating technology can extend the lifespan of sensors by up to three times. *For more details, please refer to the catalog. Feel free to contact us with any inquiries.*

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Temperature sensor for ASM Epsilon

Temperature sensor for ASM Epsilon

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IBPテクノロジー

IBPテクノロジー

Industrial Electrical Equipment

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Sensor seals and connectors for sealing the extraction points of thermocouple wires, lead wires, pipes, and optical fibers from vacuum and high-pressure containers. Ceramic filling pumps for injecting liquids, cosmetics, and food liquids. Technical ceramic tubes. Mortars and pestles for tablet presses. Temperature data loggers. We also introduce software technologies for electromagnetic wave measurement and analysis.

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