This is an introduction to the world's first inline film thickness distribution measurement device that measures interference light using a thin film with an imaging spectrometer.
The imaging spectroscopic camera (hyperspectral camera) spectrally analyzes the reflected light from a linear area and outputs it as a two-dimensional image. By connecting it to a monochrome camera, spectral data from many points can be collected simultaneously.
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■Device Specifications Film Thickness Range: 50nm to 1000nm, 100nm to 5000nm, 1000nm to 100000nm Measurement Size: Field Width: can be set arbitrarily from 50mm to 2000mm Measurement Length: up to 600mm for lab equipment, no restrictions for inline (※) Number of Measurement Points: Width Direction: 1920 points (maximum) × Length Direction: 1920 points (arbitrary) Spatial Resolution: Width Direction: approximately 26μm to approximately 1.04mm Length Direction: depends on measurement conditions Measurement Time: approximately 10000 points/second as standard (Example) approximately 6 minutes for 1920 points × 1920 points Film Thickness Resolution: 1nm Measurement Accuracy: ±1% or ±3nm, whichever is larger Measurement Reproducibility: 0.5% or less Spectral Camera Dimensions: W60xD350xH90mm (excluding cables)
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■Purpose Observation, recording, evaluation, and inspection of the thickness distribution of thin films on target surfaces. ■Examples Coatings on glass and resin surfaces, surface oxide films on silicon wafers and metals, functional films. ■Measurement Examples - Coating layer of monochrome OHP sheets - Coating layer of color OHP sheets - Commercial cooking wrap - Gaps in Newton's rings - Oxide film on silicon wafers - Nitride film on silicon wafers - Polycarbonate on CD surfaces
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To solve your technical challenges in a ONE-STOP manner, our team of 1,300 technical specialists will respond quickly and accurately while maintaining strict confidentiality. With bases in six locations nationwide, our experts in various fields utilize the latest analytical testing equipment to meet all your needs. We are confident that we can provide results that will satisfy you, and we would be grateful if you could give us a try.
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