We would like to introduce a portable film thickness profile measurement device.
● Approximately 140mm linear area film thickness distribution can be measured at 1320 points Using a hyperspectral camera for measurement, the number of pixels in the spatial axis direction is 1320, allowing for the observation of film thickness distributions with a level of detail that was previously unimaginable. This enables the detection of minute film thickness variations that would have been overlooked with point measurement thickness gauges, allowing not only for the identification of sudden film thickness changes but also for pinpointing the exact locations where these changes occur. ● Continuously graphing the calculated film thickness values By continuously displaying the 1320 film thickness values on a graph, one can visualize the profile of the film thickness. ● Does not require dedicated lighting While hyperspectral cameras typically use through, constant, or line lighting, this device is equipped with a lighting window that diffuses light using a diffusion plate inside the window, eliminating the need for line lighting. ● Compact and lightweight device for easy portability Due to its lightweight design, it is easy to carry and can be used for measurements anywhere. Additionally, it can be disassembled with a single screw, allowing for even more compact transport.
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■Specifications Model: FDC-1000L Film Thickness: Range 0.05μm to 30μm Spectrometer: Imaging Spectrometer ImSpector V10H Measurement Field Width: 140mm Number of Measurement Points: 1320 points Spatial Resolution: 106μm/pixel Measurement Time: Approximately 1 to 10 seconds (varies depending on measurement conditions) Film Thickness Resolution: 1nm (can be 1Å depending on the uniformity of the film thickness of the object) Film Thickness Measurement Accuracy: ±1% or ±5nm, whichever is larger Measurement Reproducibility: 0.5% or less Dimensions: Operating: W200×D200×H300mm Disassembled: W200×D100×H300mm
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Applications/Examples of results
■Measurement Targets ・Oxide films or nitride films on silicon wafers ・Resist films on glass surfaces ・Functional films on PET films ・Material thickness of films ・Films on metal surfaces
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To solve your technical challenges in a ONE-STOP manner, our team of 1,300 technical specialists will respond quickly and accurately while maintaining strict confidentiality. With bases in six locations nationwide, our experts in various fields utilize the latest analytical testing equipment to meet all your needs. We are confident that we can provide results that will satisfy you, and we would be grateful if you could give us a try.
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