The hydrogen in the outermost single atomic layer can be evaluated using TDS.
TDS is a method that heats the sample, ionizes the released gases, and performs mass analysis. It can analyze the mass-to-charge ratio (m/z) from 2 to 199 in high vacuum (1E-7 Pa). In this case, we will introduce an example of TDS analysis conducted on a Si chip treated with hydrogen termination. The TDS was able to capture the desorption of hydrogen from the hydrogen-terminated surface.
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Analysis of LSI and memory.
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Download All Catalogs![[Analysis Case] De-gassing Analysis of Hydrogen Terminal Wafers_C0483](https://image.mono.ipros.com/public/default/object/noimage_l.gif?w=120&h=170)
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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!
![[Analysis Case] Thermal Desorption Gas Analysis of SiN Film by TDS](https://image.mono.ipros.com/public/product/image/c1d/2000247109/IPROS2634705810339025201.jpg?w=280&h=280)
![[Analysis Case] Estimation of Detachment Components by TDS](https://image.mono.ipros.com/public/product/image/db5/2000292312/IPROS1789130363943206847.jpg?w=280&h=280)
![[Analysis Case] Evaluation of De-gassing of Resist Film by TDS](https://image.mono.ipros.com/public/product/image/383/2000348357/IPROS4068605936232817982.jpg?w=280&h=280)
![[Analysis Case] De-gassing Evaluation During Temperature Holding by TDS](https://image.mono.ipros.com/public/product/image/d53/2000428729/IPROS15215178984570750876.jpg?w=280&h=280)
