You can investigate the changes in degassing intensity while maintaining the temperature.
TDS is a method for real-time detection of desorbed gases while heating the sample in high vacuum or maintaining a constant temperature. An example is shown where a SiN film on a Si substrate was held at 350°C to investigate the amount of H2 desorption. In simple heating, a desorption peak was observed around 500°C, but during the temperature hold at 350°C, the detection intensity of H2 decreased, and a desorption peak was observed upon re-heating.
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Analysis of LSI, memory, power devices, manufacturing equipment, and components.
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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!