Air-driven without electricity. Suitable for fireproof and explosion-proof areas.
The "FSBL-50" is a pump incorporated into devices designed to spray fluids such as pure water, IPA, and NMP at high pressure to remove films from cleaning targets like wafers. The material of the wetted parts is SUS316, and the check valve features a newly developed poppet valve that ensures a long lifespan without generating metal powder. Additionally, the sealing material in the pressurization section is standardly made of fluoropolymer polyethylene, and it can also accommodate organic solvent specifications such as NMP. 【Features】 ■ Compact design suitable for integration ■ Operation allows control of discharge pressure by varying the air supply pressure ■ Does not use electricity, making it suitable for fire and explosion hazard areas * For more product details, please refer to the "PDF Download" button below. * Feel free to contact us with any inquiries.
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basic information
【Specifications】 〇Size ・FSBL: W250×H191×D413 ○Discharge Pressure ・FSBL-50: 2.5～25MPa ○Discharge Flow Rate ・FSBL-50: 1.68L ○Driving Air Pressure: 0.05~0.5MPa ○Air Consumption: Approximately 670L (at pump stroke rate of 60SPM) ○Liquid Contact Seals ・Pure Water, IPA: FKM ・NMP: Kalrez
Price information
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Delivery Time
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Applications/Examples of results
【Applications】 ■ Semiconductor cleaning equipment (jet cleaning) ■ Scrubber equipment ■ Lift-off equipment ■ Dressing of polishing pads etc. 【Track Record】 Market supply for approximately 15 years since 2011.
Line up（2）
| Model number | overview |
|---|---|
| FSBL-50-FKM | |
| FSBL-50-KLZ |
catalog（1）
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Company information
"Surely, for what is in the future." With this theme, we focus on the design and manufacturing of semiconductor manufacturing equipment and related devices, developing products that meet our customers' needs. We hope that the technologies we possess can be commercialized in various fields and be of benefit to our customers. Our entire staff is passionately engaged in the process of turning our customers' ideas into products, including research and development and prototyping. We sincerely look forward to your inquiries.