High-pressure pump that can be used in areas requiring fire and explosion prevention measures due to its air-driven design.
The "SSBL-XX series" is a pump suitable for lift-off devices that remove films by high-pressure injection of pure water, IPA, NMP, etc., onto wafers and other surfaces. It can be used in locations where fire and explosion prevention measures are necessary due to its air-driven design. Fluororesin and ultra-high molecular weight polyethylene are used as sealing materials in the pressurization section. O-rings can be selected from FKM specifications or Kalrez specifications. It has been supplied to the market since 2000 for a period of 25 years. 【Features】 ■ Compact design suitable for embedding ■ Operation allows control of discharge pressure by varying air supply pressure ■ Capable of boosting pressure up to 17.6 MPa at an air pressure of 0.5 MPa (SSBL-37.5A) *For more details, please refer to the PDF materials or feel free to contact us.
Inquire About This Product
Related Videos
basic information
【Product Specifications】 ■Size ・SSBL (common for -20A, -30A, -37.5A): W123×H116×D296.5mm ■Discharge Pressure ・SSBL-20A: 0.98～9.8MPa ・SSBL-30A: 1.47～14.7MPa ・SSBL-37.5A: 1.76～17.6MPa ■Discharge Flow Rate ・SSBL-20A: 1.13L/min ・SSBL-30A: 0.71L/min ・SSBL-37.5A: 0.58L/min ■Driving Air Pressure: 0.05～0.5MPa ■Applicable Fluids FKM Specification: Pure Water, IPA Calretz Specification: NMP ■Air Consumption: Approximately 70L (at pump stroke count of 60SPM) *For more details, please refer to the PDF document or feel free to contact us.
Price information
Please feel free to contact us.
Delivery Time
※Please feel free to contact us.
Applications/Examples of results
【Applications】 ■ Semiconductor cleaning equipment (jet cleaning) ■ Scrubber equipment ■ Lift-off equipment ■ Dressing of polishing pads ■ Pressure testing and so on
Line up（6）
| Model number | overview |
|---|---|
| SSBL-20A-FKM | |
| SSBL-20A-KLZ | |
| SSBL-30A-FKM | |
| SSBL-30A-KLZ | |
| SSBL-37.5A-FKM | |
| SSBL-37.5A-KLZ |
catalog（1）
Download All Catalogs
Company information
"Surely, for what is in the future." With this theme, we focus on the design and manufacturing of semiconductor manufacturing equipment and related devices, developing products that meet our customers' needs. We hope that the technologies we possess can be commercialized in various fields and be of benefit to our customers. Our entire staff is passionately engaged in the process of turning our customers' ideas into products, including research and development and prototyping. We sincerely look forward to your inquiries.