We will introduce the technologies and processing examples we propose based on the work material, film type, and film thickness!
"Vapor phase technology" is utilized in various fields such as 'new materials and substances' and 'energy' including resin raw materials and fuel cells, as well as in 'medical and healthcare' applications like medical sensors and devices, and in 'mobile devices', 'wearable devices', and 'automotive' sectors including electronic components and new displays. Additionally, it achieves film formation in the range of 1nm to 1000nm with diverse processes, film thicknesses, and types. Coating is performed using deposition methods such as evaporation, CVD, ALD, and sputtering. 【Features】 ■ ALD Robot CVA series Enables high-quality film formation at low temperatures, which is considered difficult in ALD. ■ Barrel-type ALD Robot CVA-B series A fusion of low-temperature ALD equipment and barrel mechanism. ■ Low-temperature high-frequency excitation DLC film formation device CVC series Allows for good adhesion film formation from graphite to DLC at low temperatures. ■ Bubbling CVD Robot CVB series Liquid to gas Enables low-cost and high-quality film formation at low temperatures. ■ IBAD (Ion Beam Assisted Deposition) CVI series Examples of contract film formation using IBAD Allows for low-energy irradiation at low temperatures, improving the adhesion of transparent conductive films (Zn O) and high-melting-point metal electrode formation for touch panels.
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【Examples of Contract Film Deposition by ALD】 Film thickness below 100nm ■ Deposition Specifications Workpieces: Wafers, metals (SUS, aluminum, copper, etc.), resins, films, and others Size: Any shape is acceptable as long as one side is about 100mm ■ Applicable Films SiO₂, Al₂O₃, TiO₂, ZrO₂, HfO, etc. 【Examples of Contract Film Deposition by DLC】 Film thickness approximately 100nm to 1μ ■ Deposition Specifications Workpieces: Conductive films, structural reinforcements, low-friction films, resin products, automotive parts, metal parts, medical products, etc. Size: Any shape is acceptable as long as one side is about 100mm ■ Applicable Films DLC films, graphite films 【Examples of Contract Film Deposition by IBAD】 Film thickness 100 to 1000nm ■ Deposition Specifications Workpiece size: φ100 to 300mm (irregular shapes and cylinders are also possible) Layer formation: Single-layer films and multi-layer films possible (Max. 4 layers) Pattern deposition: Metal mask compatible (optional) ■ Applicable Films Refractory metals, chromium, silicon, aluminum, copper, SiO₂, SiN, ZnO, etc. In addition to the items introduced, we may also be able to accommodate other requests depending on customer needs. *For more details, please refer to the PDF materials or feel free to contact us.
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One of the key technologies for achieving carbon neutrality is next-generation batteries, along with nanoscale functional particles with various capabilities, the proliferation of 5G and 6G communication systems and environmentally friendly vehicles, and the advancements in advanced driver-assistance systems (ADAS). There is a growing expectation for our coating technology in various fields of society, including passive components such as MLCCs, which require miniaturization and high reliability, high-quality healthcare through digital transformation (DX), and medical devices advancing with AI and digitalization.