[Improvement without product] MEMS microscope (dual-side pattern misalignment inspection device)
Monitor with a microscope camera to inspect for pattern misalignment and discrepancies!
At Arrows Engineering, we handle MEMS microscopes manufactured by IT Tech. The "TMIR-2000" can monitor MEMS wafers from both sides using microscope cameras, allowing for pattern misalignment and misregistration inspections. With newly developed software, the optical axes of the two cameras are aligned and synthesized in real-time, directly capturing any vertical overlap misalignment. Additionally, automatic line width measurement allows for sub-micron measurement of mark misalignment. 【Basic Configuration (Excerpt)】 ■ MEMS Microscope Main Unit ■ Triple Eyepiece Tube ■ 10x Eyepiece ■ XY Stage ■ Two Color Cameras ■ Inspection PC/19-inch Monitor/MEMS Inspection Software, etc. *For more details, please refer to the PDF document or feel free to contact us.
Inquire About This Product
basic information
【Options】 ■ Objective ELWD20, 50, 100 (2) ■ TSV Micro-diameter Depth Measurement Adapter ■ Thickness Step Measurement Device, 0.1μm Focus Aid + Displacement Meter (2) Counter ■ Infrared Microscope Unit for Comparative Measurement of Si Transmission Images and Visible Camera Images *For more details, please refer to the PDF document or feel free to contact us.
Price information
Delivery Time
Applications/Examples of results
【Purpose】 ■ Pattern misalignment and deviation inspection *For more details, please refer to the PDF document or feel free to contact us.
catalog（1）
Download All Catalogs
Company information
Since our company's establishment in 1986, we have long been engaged in semiconductor-related businesses that support Japan's cutting-edge technology. On the hardware side, we have developed construction and manufacturing environments, including clean rooms. On the human resources side, we have focused on training semiconductor engineers and establishing a service system that can promptly respond to customer needs. Last year, we participated in SEMICON Japan for the first time, and by directly interacting with many industry stakeholders, we were able to learn again what is currently needed and what services should be created. At the same time, the morale within the company has been rising, and we are actively conducting sales activities. It is said that the Japanese economy is finally showing signs of recovery. However, even just looking at the semiconductor industry, the entry of overseas manufacturers and the significant improvement in technology and services are remarkable, so we aim to enhance our international competitiveness in our sales expansion. Not only domestically but also in response to the era of globalization, our role as a hub connecting North America and Asia, especially given our excellent airport access, will further increase.
