TS2000-HP High Power Auto Prober

basic information

A device developed for high voltage and high current applications - High power device measurement on wafer up to 10kV/600A - Utilizes gold-plated chucks with low contact resistance. Improved vacuum holes to allow for the adsorption of thin wafers as thin as 50 μm - Capable of mounting Taiko wafers (optional) - Dedicated probe for high voltage/high current measurement - Arc discharge prevention technology - Unique ShielDEnvironment chamber with a safe design - Excellent EMI/RFI shielding and light-shielding environment - Capable of measuring microcurrents at the fA level - Supports a wide temperature range (-60℃ to 300℃) - Wafers can be easily loaded from the front. Loader for automatic measurement from the side (pre-alignment) - Safe measurement environment with interlock mechanism and light curtain in accordance with safety standards - Integrated active vibration isolation mechanism - Fully integrated prober-controller that enables fast, safe, and convenient measurements - Safety Test Management (STM?) function allows for wafer loading/unloading at all temperatures and automatic control of dew point (optional)

Price information

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Delivery Time

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Applications/Examples of results

8-inch (200mm) high power auto prober

Detailed information

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  Light curtain A light curtain that detects intrusions within the measurement area.

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  Shield mechanism

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  High Current Probe It can measure up to 200A (pulses). The multi-finger high current probe integrates the needle and the probe body to achieve high current and low contact resistance.

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  High voltage probe It can measure up to 10kV (coaxial) and 3kV (triaxial) with low leakage. You can choose from various options for the connection connectors, including Keysight's Triax/UHV connectors, Kistler's Triax/UHV connectors, SHV, and banana connectors.