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  6. TS3500-SE-300mm Full Auto Option Prober

TS3500-SE-300mm Full Auto Option Prober

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TS3500-SE

last updated:Feb 12, 2019

MPI Corporation
MPI Corporation
  • Official site

IV/CV, pulsed IV, 1/f noise, fully automated option for RF measurement, compatible with WaferWallet, 300mm auto prober.

300mm auto-prober for various on-wafer applications such as device modeling, RF and millimeter-wave measurements, WLR, and failure analysis. Models available with WaferWallet option that can be upgraded to a full auto-prober. Agent in Japan: Vector Semiconductor Co., Ltd. 2-43-2 Nishi-Nippori, Arakawa-ku, Tokyo TEL 03-5604-1701 FAX 03-5604-1707

    Testing Equipment and DevicesOther inspection equipment and devices
TS3500-SE.png

TS3500-SE-300mm Full Auto Option Prober

TS3500-SE.png
TS3500-SE.png
  • Related Link - http://www.mpi-corporation.jp/ja/ast/engineering-p…

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basic information

Diverse Applications of On-Wafer Testing - Device Modeling: DC-IV, DC-CV, Pulsed IV, ESD, 1/f Noise Measurement - RF/Millimeter Wave High-Frequency Measurement: Up to 110 GHz, Above 110 GHz - WLR: Accurate stress and measurement conditions can be set WaferWallet Option - Ergonomically designed for manual wafer handling, with five independent trays - Fully automated measurement of up to five identical wafers across multiple temperature ranges - Unique technology allows for wafer handling at low and high temperatures ShielDEnvironment - High-performance EMI/RFI/shielding environment ideal for 1/f noise measurement - Ultra-low noise IV measurements down to fA levels - Programmable microscope movement mechanism for operational ease and automation - Wide temperature range support (-60 to 300°C, flexible measurement configurations) - Easy loading of the specimen from the front - Integrated active vibration isolation mechanism - Automatic dew point control via Safety Test Management function (optional) - Compact design achieved through built-in chiller in the prober

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Applications/Examples of results

12-inch (300mm) high-performance auto prober with full auto option

Detailed information

  • TS3500-SE_WaferWallet.png

    By using WaferWallet, it is possible to automate measurements as a full-auto prober without compromising measurement functionality.

  • 2.2

    WaferWallet Zoom Photo Fully automated testing using up to five identical wafers at different temperatures is now possible.

  • 2.3

    WaferWallet in a state with wafers inserted Can hold wafers of 150, 200, or 300 mm.

  • TS3500-SE_height.png

    Ergonomic operating height The operating height has been redesigned to improve work efficiency compared to conventional designs.

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TS3500-SE-300mm Full Auto Option Prober - FS

TS3500-SE-300mm Full Auto Option Prober - FS

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MPI

MPI Corporation

Electronic Components and Semiconductors

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The MPI AST Division handles research and development probes and high-frequency probe-related products. - Over 50 years of extensive experience in device modeling, RF/millimeter wave, WLR, high power, and failure analysis - Innovative ideas with a future-oriented perspective - Partnerships with customers and collaborators worldwide We will provide products that meet our customers' needs. Agent in Japan: Vector Semiconductor Co., Ltd. 2-43-2 Nishi-Nippori, Arakawa-ku, Tokyo TEL 03-5604-1701 FAX 03-5604-1707

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