TS3000-SE-300mm Auto Prober

basic information

Support for diverse applications of on-wafer testing - Device modeling: DC-IV, DC-CV, pulsed IV - RF and millimeter wave: 26 to 110 GHz band / above 110 GHz - WLR: high temperature / low temperature / stress testing - Failure analysis: probe card / internal node testing MPI's proprietary ShielDEnvironment chamber - Excellent EMI/RFI shielding and light-tight environment lead to ideal 1/f noise measurement results - Capable of measuring microcurrents at the fA level - Supports a wide temperature range (60°C to 300°C) - Wafer can be easily loaded from the front. Loader from the side for automatic measurement (pre-alignment) - Vertical Control Environment (VCE) technology allows observation of the probe tip from the side, enabling safe operation - Integrated active vibration isolation mechanism - Safety Test Management (STM?) function enables wafer loading/unloading at all temperatures and automatic dew point control (optional)

Price information

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Delivery Time

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Applications/Examples of results

12-inch (300mm) high-performance auto-prober

Detailed information

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  The PRIME temperature chuck, integrated with the chiller's prober, features a space-saving design that allows for use in narrow laboratories and similar environments. The 300mm temperature chuck, PRIME chuck, co-designed by MPI and ERS, offers excellent flexibility and reduces the time to temperature stability to as short as 60% compared to traditional temperature chucks. Additionally, it has many advantages to consider, including superior electrical characteristics, inert gas environment compatibility, and field-upgradable options.

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  ShielDCap (DC Positioner) ShielDEnvironment is a high-performance environmental chamber installed on the probe itself, achieving EMI shielding and a light-shielding environment necessary for ultra-low noise and low capacitance measurements. It can accommodate up to 8 DC/Kelvin ports. ShielDCap can be easily removed and can also be easily replaced with EMI shield-compatible probe card holders, contributing to work efficiency.

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  ShildCap (RF Positioner) ShielDEnvironment can support up to 4 RF ports.

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  Adoption of ERS Corporation's AC3 Cooling Technology The temperature chuck employs ERS Corporation's patented AC3 cooling technology, and when purging the air within the ShielDEnvironment, it utilizes "used" dry air, allowing for a reduction in dry air consumption by 30 to 50% compared to other companies' probers.