High precision, high reliability 200mm auto-prober for high power measurement.
A device developed for high voltage and high current (10kV/600A) applications.
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basic information
A device developed for high voltage and high current applications - High power device measurement on wafer up to 10kV/600A - Utilizes gold-plated chucks with low contact resistance. Improved vacuum holes to allow for the adsorption of thin wafers as thin as 50 μm - Capable of mounting Taiko wafers (optional) - Dedicated probe for high voltage/high current measurement - Arc discharge prevention technology - Unique ShielDEnvironment chamber with a safe design - Excellent EMI/RFI shielding and light-shielding environment - Capable of measuring microcurrents at the fA level - Supports a wide temperature range (-60℃ to 300℃) - Wafers can be easily loaded from the front. Loader for automatic measurement from the side (pre-alignment) - Safe measurement environment with interlock mechanism and light curtain in accordance with safety standards - Integrated active vibration isolation mechanism - Fully integrated prober-controller that enables fast, safe, and convenient measurements - Safety Test Management (STM?) function allows for wafer loading/unloading at all temperatures and automatic control of dew point (optional)
Price information
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Delivery Time
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Applications/Examples of results
8-inch (200mm) high power auto prober
Detailed information
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Light curtain A light curtain that detects intrusions within the measurement area.
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Shield mechanism
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High Current Probe It can measure up to 200A (pulses). The multi-finger high current probe integrates the needle and the probe body to achieve high current and low contact resistance.
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High voltage probe It can measure up to 10kV (coaxial) and 3kV (triaxial) with low leakage. You can choose from various options for the connection connectors, including Keysight's Triax/UHV connectors, Kistler's Triax/UHV connectors, SHV, and banana connectors.
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Company information
The MPI AST Division handles research and development probes and high-frequency probe-related products. - Over 50 years of extensive experience in device modeling, RF/millimeter wave, WLR, high power, and failure analysis - Innovative ideas with a future-oriented perspective - Partnerships with customers and collaborators worldwide We will provide products that meet our customers' needs. Agent in Japan: Vector Semiconductor Co., Ltd. 2-43-2 Nishi-Nippori, Arakawa-ku, Tokyo TEL 03-5604-1701 FAX 03-5604-1707
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