High precision, high reliability IV, CV, pulsed IV, 1/f, 200mm auto-prober for RF measurements.
200mm auto-prober compatible with various on-wafer applications such as device modeling, RF and millimeter-wave measurements, WLR, and failure analysis. Agent in Japan: Vector Semiconductor Co., Ltd. 2-43-2 Nishi-Nippori, Arakawa-ku, Tokyo TEL 03-5604-1701 FAX 03-5604-1707
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basic information
Support for diverse applications of on-wafer testing - Device modeling: DC-IV, DC-CV, pulsed IV - RF and millimeter wave: 26 to 110 GHz band / above 110 GHz - WLR: high temperature / low temperature / stress testing - Failure analysis: probe card / internal node testing MPI's unique ShielDEnvironment chamber - Excellent EMI/RFI shielding and light-tight environment lead to ideal 1/f noise measurement results - Capable of measuring microcurrents at the fA level - Wide temperature range support (60°C to 300°C) Ergonomically designed / options - Wafer can be easily loaded from the front. Loader from the side for automatic measurements (pre-alignment) - Vertical Control Environment (VCE) technology allows observation of the probe tip from the side, enabling safe operation - Integrated active vibration isolation mechanism - Safety Test Management (STM) function enables wafer loading/unloading at all temperatures and automatic dew point control (optional)
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Applications/Examples of results
8-inch (200mm) high-performance auto-prober
Detailed information
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ShielDCap (DC Positioner) ShielDEnvironment is a high-performance environmental chamber installed on the probe itself, providing EMI shielding and a light-tight environment necessary for ultra-low noise and low capacitance measurements. It can accommodate up to 8 DC/Kelvin ports. ShielDCap can be easily removed and can also be easily replaced with EMI shield-compatible probe card holders, contributing to work efficiency.
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ShildCap (RF Positioner) ShielDEnvironment can accommodate up to 4 RF ports.
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Single Wafer Loader Enables wafer exchange at high/low temperatures With the safety-designed pre-alignment feature of the single wafer loader, it is now possible to load/unload wafers at any temperature. There is no longer a need to raise or lower the temperature to room temperature. This significantly reduces measurement downtime.
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Adoption of ERS Corporation's AC3 Cooling Technology The temperature chuck utilizes ERS Corporation's patented AC3 cooling technology, and by using "used" dry air when purging the air within the ShielDEnvironment, it has become possible to reduce dry air consumption by 30-50% compared to other companies' probers.
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Company information
The MPI AST Division handles research and development probes and high-frequency probe-related products. - Over 50 years of extensive experience in device modeling, RF/millimeter wave, WLR, high power, and failure analysis - Innovative ideas with a future-oriented perspective - Partnerships with customers and collaborators worldwide We will provide products that meet our customers' needs. Agent in Japan: Vector Semiconductor Co., Ltd. 2-43-2 Nishi-Nippori, Arakawa-ku, Tokyo TEL 03-5604-1701 FAX 03-5604-1707
