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  6. Photo mask cleaning device (semi-auto)

Photo mask cleaning device (semi-auto)

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last updated:Oct 21, 2024

ソフエンジニアリング
ソフエンジニアリング
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It is a long-selling model with cumulative sales of over 200 units in the series.

■We boast a 90% market share in the domestic mask manufacturing industry. ■Ideal for "post-polishing cleaning," "incoming cleaning," and "final cleaning." ■We have extensive experience in "removing resist adhered during contact exposure" for device manufacturers. ■These are standard devices categorized by substrate size, but custom solutions are also available. ■The basic processing sequence is "detergent/scrub ⇒ DIW2 fluid ⇒ front and back rinse ⇒ spin dry."  ◎The scrub and two-fluid processing feature a standard scan rotation function.  ◎Excellent particle removal with the DIW2 fluid tool.  ◎Scrub brushes can be selected based on the substrate surface condition: nylon brush or PVA brush. ■Various options are available to meet diverse needs.  ◎<Automatic dilution of detergent><Self-ultrasonic cleaning of brushes><CO2 ionizer><MS cleaning> ■We have extensive experience in handling automatic transport processing devices for substrates. *For more details, please refer to the PDF document or feel free to contact us. Sheet-type cleaning devices, coating and developing devices, substrate cleaning devices, spin cleaning devices, semiconductor manufacturing devices, semiconductors, resist stripping devices, megasonic cleaning devices, cleaning devices, resist, photoresist, photolithography process, mask cleaning devices, wafer cleaning devices.

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Photo mask cleaning device (semi-auto)

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  • Related Link - https://www.sofu-e.com/page8
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Photo mask cleaning device

Photo mask cleaning device

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ソフエンジニアリング

ソフエンジニアリング

Industrial Electrical Equipment

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* Under a team of experts well-versed in the manufacturing processes of various devices, we engage in consistent in-house activities that include the custom development, manufacturing, and sales of distinctive wet processing equipment tailored to meet the diverse needs of our clients, backed by years of accumulated know-how since our establishment, as well as after-sales support. * We manufacture and sell optimal system equipment while proposing processes that align with our clients' needs. * Our company is well-acquainted with various equipment forms such as batch (wet stations) and sheet (conveyor, spin), and we have numerous achievements; however, we particularly stand out with our Spin sheet-type equipment. * With the establishment of "patents" and "trademarks," we ensure that our products, such as the "Spin Dip Processor" and "UDS Processor," which possess a wide variety of unique features, cannot be easily replicated by others, attracting worldwide attention.

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