Significantly contributes to the reduction of CO2 emissions during operation! Ultra-compact clean robot.
The AR1300-220 is an ultra-compact, lightweight tabletop single-arm clean robot. It can build a tabletop system for transporting conventional sorters and inspection devices. To reduce the size of the controller, the motor driver can be stored in the bottom of the robot. 【Features】 ■ The motor driver can be stored in the bottom of the robot ■ Significantly contributes to the reduction of CO2 emissions during operation ■ Board holding: Wafer is vacuum suctioned ■ Equipped with various sensors ■ Equipped with a two-phase pulse motor with an encoder ■ Dedicated command control via RS232C *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Specifications (Excerpt)】 ■ Arm - Operating range: 300mm - Transport speed: 300mm/0.8sec - Resolution: 19.69μm ■ Rotation - Operating range: 340 degrees - Transport speed: 180 degrees/0.8sec - Resolution: 0.0068 degrees ■ Up and Down - Operating range: 220mm - Transport speed: 220mm/0.8sec - Resolution: 13.13μm ■ Transported object: 200mm wafer ■ Repetition accuracy: ±0.2mm or less *For more details, please refer to the PDF document or feel free to contact us.
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【Applications】 ■LED/MEMS/Power Device Fields *For more details, please refer to the PDF document or feel free to contact us.
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Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."