Low power consumption under 100W! The transport arm adopts a unique compact and lightweight multi-stage sliding mechanism.
The "AR2300-220" is a tabletop wafer transport device equipped with functions similar to conventional clean robots. It adopts a unique compact and lightweight multi-stage slide mechanism for the transport arm. By reducing the weight of the rotation and vertical axes, it achieves a simple structure with a mass of less than one-third compared to conventional models. 【Features】 ■ Achieves a mass of less than one-third compared to conventional models ■ Cleanliness measures: unique structure that sucks air from the side of the lower cover ■ Achieves low power consumption of less than 100W ■ Dedicated command control via RS232C ■ Equipped with a two-phase pulse motor with an encoder *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications (Excerpt)】 ■ Arm - Operating Range: 300mm - Transport Speed: 300mm/1.0sec - Resolution: 22.5μm ■ Rotation - Operating Range: 340 degrees - Transport Speed: 180 degrees/0.8sec - Resolution: 0.0073 degrees ■ Up and Down - Operating Range: 220mm - Transport Speed: 220mm/0.8sec - Resolution: 15.00μm ■ Transported Object: φ76.2mm, φ100mm wafer ■ Repetition Accuracy: ±0.2mm or less *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■LED/MEMS/Power Device Fields *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."