The hand can be rotated 180 degrees with a stepping motor drive! Link-type clean robot.
The "PR1111-200" is a link-type single-arm clean robot with a specification of 2P stepping motors for all axes. The hand can be rotated 180 degrees by a stepping motor drive. The rotation axis is equipped with a home position sensor, a motor stall detection sensor, and a 180-degree position sensor. 【Features】 ■ 2P stepping motor specification for all axes ■ The rotation axis is equipped with a home position sensor, a motor stall detection sensor, and a 180-degree position sensor ■ Chuck: Special I-type chuck made of a laminated structure of aluminum and stainless steel *For more details, please refer to the PDF materials or feel free to contact us.
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【Specifications】 ■Arm ・Operating range: 354mm ・Transport speed: 354mm/0.8sec ・Resolution: 21.6μm or less ■Swing ・Operating range: 330 degrees ・Transport speed: 180 degrees/0.8sec ・Resolution: 0.00556 degrees ■Up and down ・Operating range: 200mm ・Transport speed: 200mm/0.8sec ・Resolution: 5μm ■Hand inversion ・Operating range: 180 degrees ・Transport speed: 180 degrees/1.2sec ・Resolution: 0.05625 degrees ■Transported object: 5, 6, 8-inch silicon wafers ■Repeat accuracy: ±0.1mm or less ■Cleanliness: ISO Class 2 *For more details, please refer to the PDF document or feel free to contact us.
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【Application】 ■Semiconductor field *For more details, please refer to the PDF document or feel free to contact us.
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Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."