High precision & high rigidity! Wafer transport robot compatible with 2-12 inch wafers [E Series]
Adopting our own DD motor, characterized by high precision and high rigidity. Compatible with 2-12 inch wafers. The design has minimal aging degradation without gears, and the reduced number of parts also decreases maintenance labor. The robot, which balances high performance and affordability, is not limited to wafer transport; it also offers custom solutions for PCB and glass substrate transport applications, and we can propose transport axes for the robot itself tailored to specifications.
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basic information
Single Arm / Double Arm Arm Length: 135mm / 165mm / 185mm The end effector supports vacuum suction, gripping, and inverting methods.
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Applications/Examples of results
For transportation in the semiconductor, panel, and substrate-related industries.
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Company information
HIWIN is a global company headquartered in Taichung, Taiwan, with a capital of approximately 15.8 billion yen and around 4,500 employees. In addition to Japan, it has bases in 12 countries worldwide, including Germany and the United States. As a world-class manufacturer of linear motion equipment, HIWIN focuses on product development to meet the diverse needs of its customers, accumulating a track record of supplying to leading machine tool manufacturers, automotive manufacturers, and semiconductor and manufacturing equipment manufacturers, and advancing as a preferred partner company. (ISO9001, ISO14001, ISO45001 certified) Furthermore, HIWIN develops and manufactures a wide range of mechatronic products, providing solutions that extend beyond merely being a parts manufacturer to various industries. Established in 1999, HIWIN Corporation, the Japanese subsidiary, is based in Kobe City, Hyogo Prefecture, and has sales offices in 10 cities across Japan. In 2022, it established a headquarters factory with research and development capabilities on a site of approximately 7,500 tsubo in Kobe City. Moving forward, our company will demonstrate expertise in each field and strive to provide optimal solutions to our customers through the manufacturing and development of valuable products, contributing to the development of Japan's industry as a company that "supports next-generation manufacturing."