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  6. Plasma device, plasma cleaner, plasma cleaning equipment catalog.

Plasma device, plasma cleaner, plasma cleaning equipment catalog.

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last updated:Aug 06, 2020

ヤマトマテリアル
ヤマトマテリアル
  • Official site

We protect the environment with dry cleaning plasma technology and significantly improve the productivity of semiconductor devices.

This catalog features plasma devices handled by Yamato Material. In addition to demo units and the lineup of plasma devices, we also introduce "The Mechanism of RIE Plasma Treatment" and "The Mechanism of DP Plasma Treatment." Our company offers plasma devices tailored to the processing purposes of plasma dry cleaners, etchers (etching), and ashers (ashing), in both standard and custom-made options. We handle everything from planning to proposals in a consistent manner. [Contents] ■ Market and Applications ■ Explanation of Plasma Modes ■ Demo Unit Lineup ■ Plasma Device Lineup *For more details, please refer to the PDF materials or feel free to contact us.

    Etching EquipmentAshing deviceOther semiconductor manufacturing equipment
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Plasma device, plasma cleaner, plasma cleaning equipment catalog.

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  • Related Link - https://www.yamato-material.co.jp/electronics/plas…

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【Featured Products (Excerpt)】 Plasma Equipment Plasma Dry Cleaner Plasma Cleaning Equipment Plasma Cleaner Plasma Automation Machine Plasma Etcher Plasma Asher ■PIPI ■PDC210 ■PDC510 ■PDC610 ■YSP600U/YSP2KU ■YSP63FA ■YSP68W/YSP68WL ■YSP650W *For more details, please refer to the PDF document or feel free to contact us.

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Applications/Examples of results

【Applications (Excerpt)】 Plasma Dry Cleaner, Plasma Cleaning Device, Plasma Cleaner, Plasma Etcher, Plasma Asher, Improved Wettability ■ Semiconductor Related - Improved adhesion of photoresist, resist removal ■ IC/LED Assembly Related - Increased wire bonding joint strength, cleaning before die attach ■ Optical Related - Pre-treatment for lens adhesion and coating ■ Bio/Medical Related - Increased strength of microchips, improved hydrophilicity of microchip channels ■ Materials - Increased bonding strength of polymer materials, pre-treatment for coating of polymer materials ■ FPD Related - Increased bonding strength of LCD panels, improved adhesion of protective and polarizing films *For more details, please refer to the PDF document or feel free to contact us.

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ヤマトマテリアル

ヤマトマテリアル

Electronic Components and Semiconductors

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We have received high praise from semiconductor manufacturers for our development of IC sockets for semiconductor evaluation. Currently, we flexibly and swiftly respond to the diverse needs of automotive electronics, image sensors, and semiconductor manufacturers, providing a comprehensive proposal of materials necessary for development, prototyping, evaluation, production, and shipping. We also boldly challenge ourselves in the development of new products, supporting the rapidly changing electronics industry. Additionally, as of October 1, 2006, Yamato Glass has changed its company name to Yamato Material Co., Ltd. to aim for greater possibilities, with the goal of further business expansion alongside the penetration of an accurate corporate brand image.

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