High-speed maskless aligner capable of fine drawing at 0.6μm.
The Maskless Aligner MLA150 is a non-contact laser exposure device that does not require a mask. With its exceptional ease of use and high speed, it is an ideal laser direct writing system for rapid prototyping, small to medium production, and research and development environments. Since the Maskless Aligner series was first introduced in 2015, innovative and cutting-edge maskless technology has been established. The MLA150 is positioned as an alternative to traditional mask aligners, with over 130 units shipped.
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basic information
Minimum substrate size: 5 mm x 5 mm Maximum exposure area: 6 inches x 6 inches (optional: 8 inches x 8 inches) Minimum structure size down to 0.6 μm Real-time autofocus (standard: pneumatic, optional: optical) Front and back alignment (optional: backside alignment mechanism) High aspect ratio mode (ultra-thick resist exposure) User-friendly operating software Keywords: laser exposure equipment, laser drawing equipment, direct writing equipment, maskless, microfabrication
Price range
P8
Delivery Time
Applications/Examples of results
Micro optics, microfluidics, biomedical fields, MEMS, semiconductors, FPD, sensors, MOEMS, waveguides, material evaluation and development, nanotubes, graphene, mask manufacturing.
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Company information
Heidelberg Instruments, Inc. is the Japanese subsidiary of Heidelberg Instruments Mikrotechnik, a German company that develops and manufactures laser direct writing systems and mask writing systems. We provide sales and technical services for laser direct writing systems within Japan. We offer a wide range of products, including laser writing systems and maskless aligners. For anything related to laser lithography, please feel free to consult with us.