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  6. Particle ALD (Atomic Layer Deposition) device / FORGE NANO Inc.

Particle ALD (Atomic Layer Deposition) device / FORGE NANO Inc.

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FORGE NANO Inc.

last updated:Jun 11, 2020

マツボー
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ALD (Atomic Layer Deposition) equipment dedicated to particles can deposit films on nanoscale particles.

The particle ALD (Atomic Layer Deposition) system for research and development can be utilized for various development purposes. It is capable of processing film formation on nanoscale particles from milligrams to kilograms. - Uniform control of film thickness using methods including fluidized beds - Three sizes of reactors with different capacities - Individual temperature control for multiple precursors - Ability to deposit various films on diverse particle materials - Easy creation of custom recipes and automated operation - Removable particle containers * There is also a lineup of equipment for mass production.

    Lithium-ion batteryCVD EquipmentOther surface treatment equipment
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Particle ALD (Atomic Layer Deposition) device / FORGE NANO Inc.

  • FORGE NANO Inc.
  • Special site - Product/service details - https://pr.mono.ipros.com/matsubo/product/

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basic information

We can propose mass production machines scaled up from research and development lab equipment. As a solution provider for particle ALD, we are engaged in the following businesses: ■ Research and development services ■ Contract film deposition (from milligrams to kilograms) ■ Equipment sales (from lab machines to mass production machines)

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Applications/Examples of results

<Materials> - Lithium-ion batteries - Industrial powders - Various other particle materials <Applications> - Surface protection - Corrosion resistance - Functional enhancement - Stabilization - Others

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    ALD (Atomic Layer Deposition) equipment for research and development for particles.

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Matsubo provides services in two business areas: [Industrial Machinery & Information] and [Powder Technology], supported by a [Technical Center] backup system. Breaking away from the confines of a specialized machinery trading company, we have established a comprehensive service system to ensure our customers can use our products with confidence, ranging from consulting prior to implementation, engineering related to installation and localization, to maintenance and proposals for improvements and modifications after installation.

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