For research and development, for small-scale batches! Standard equipped with a simple decontamination unit ALD Shield Vapor Trap.
The "Savannah G2" is a flexible thermal ALD device that is simple and easy to use, capable of supporting everything from research and development to small-scale mass production. It achieves high film deposition performance with a simple system, and configurations can be selected according to applications and budgets. Please feel free to contact us if you have any inquiries. 【Features】 ■ Achieves high film deposition performance with a simple system ■ Ultra-high aspect ratio (less than 2000:1) compatible mode ■ Configuration selection based on applications and budgets ■ Precursor lines: up to 6 lines ■ Simple exhaust unit: ALD Shield Vapor Trap standard equipped * For more details, please refer to the PDF materials or feel free to contact us.
Inquire About This Product
basic information
【Other Features】 ■Abundant Options - Ozone Generator - Dome Lid - LVPD - QCM - SAMS - Powder Coating - Glove Box I/F - Plasma Kit *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
catalog（1）
Download All Catalogs![Engineering technology that connects advanced overseas systems with customer needs [Product Catalog]](https://image.mono.ipros.com/public/catalog/image/01/91b/693047/IPROS43453220463784595934.jpeg?w=120&h=170)
Company information
Our company website features information on used equipment related to FPD and semiconductors. ● Main Business Activities Purchase of used semiconductor manufacturing equipment, refurbishment, sales, and setup operations Construction and consulting for semiconductor manufacturing lines Purchase of used FPD manufacturing equipment, refurbishment, sales, and setup operations Construction and consulting for FPD manufacturing lines Contract development, manufacturing, and sales of semiconductor manufacturing equipment and FPD manufacturing equipment Sales of various equipment parts Agency sales of overseas manufactured equipment