Excellent measurement linearity over a wide range! Can be verified on a PC monitor as a three-dimensional graphic map.
The "LEI-1510 series" is a non-contact sheet resistance measurement device manufactured by the former Reihiton company. By attaching a robot, it is possible to quickly measure and process multiple samples. It solves the reproducibility issues caused by probe contact contamination and the contact condition that occur with the four-probe method. It measures sheet resistance non-contact and destructively for Si wafers ranging from 2 inches to a maximum of 8 inches, as well as compound semiconductor (GaAs, GaN, InP, etc.) epi wafers. 【Features】 - Solves reproducibility issues caused by probe contact contamination and contact conditions - Capable of quickly measuring and processing multiple samples - Excellent measurement linearity over a wide range of 0.035 to 3200 ohm/sq. - Measurement data can be viewed as a three-dimensional graphic map on a PC monitor *For more details, please refer to the PDF document or feel free to contact us.
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【Function Details】 ■ Capable of measuring up to 300 points ■ Automatic drift correction ■ Measurement range selection for resistance via software ■ Cassette-to-cassette sorting ■ External thickness input ■ Wafer mapping (2D contour lines, 3D graphics) ■ SPC (Statistical Process Control) statistical management software * For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Semilab is a comprehensive measurement device manufacturer that supports research and manufacturing of cutting-edge technologies worldwide. We handle non-contact CV measurement devices, lifetime measurement devices, spectroscopic ellipsometers, photoluminescence, DLTS systems, sheet resistance measurement devices, nanoindenters, AFM, and more for the inspection of semiconductor wafers and devices. Please feel free to contact us for specifications and pricing of our devices.