Fully automatic spreading resistance measurement device
The SRP (Spreading Resistance Profiler) device measures the resistivity profile of silicon in the depth direction, the thickness of the EPI layer, the depth of the PN junction, and the carrier concentration distribution by making contact with two probes on a diagonally polished silicon wafer in the depth direction and measuring the spreading resistance value between the probes.
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basic information
- Measurement can be performed with simple keyboard operations, eliminating the need for skilled labor. Continuous measurement of multiple samples is possible in fully automatic mode, significantly reducing the operator's time spent on the system. - The alignment of the two probes with the sample is automated using a CCD camera and vision system. - The conditioning of the probes and the input of calibration curves are automated. - Up to six sample holders can be mounted at once, allowing for continuous measurement of numerous samples. - The adoption of the BAM laser sensor has automated angle correction.
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Applications/Examples of results
The SRP (Spreading Resistance Profiler) device contacts a beveled Si wafer with two probes in the depth direction and measures the spreading resistance value between the probes to determine the resistivity profile of Si in the depth direction, the thickness of the EPI layer, the depth of the PN junction, and the carrier concentration distribution.
Company information
Semilab is a comprehensive measurement device manufacturer that supports research and manufacturing of cutting-edge technologies worldwide. We handle non-contact CV measurement devices, lifetime measurement devices, spectroscopic ellipsometers, photoluminescence, DLTS systems, sheet resistance measurement devices, nanoindenters, AFM, and more for the inspection of semiconductor wafers and devices. Please feel free to contact us for specifications and pricing of our devices.
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