Function to measure surface and nano structures! Covers from millimeters to atomic level.
We introduce a combined system of Scanning Electron Microscope (SEM) and Atomic Force Microscope (AFM). Using the zoom function of the SEM, the AFM chip can be directly moved to the target area. Information about surface morphology and mechanical, electrical, and magnetic properties can be obtained with nanometer resolution. AFM can be utilized with the Merlin series and Crossbeam series, and existing systems can be updated with a simple door replacement. 【Features】 ■ SEM and FIB intersect with a cantilever chip ■ Composite measurements of all three methods can be performed at the exact same point in space and on the sample ■ Designed to achieve 3D resolution at the single atom level ■ Maintains a minimum SEM working distance of 5mm while allowing a viewing angle of 0° to 85° with the SEM ■ Supports in-situ chip sharpening with FIB *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 ■ Switching between AFM and standard Auriga functions can be easily performed using a user-replaceable SEM door. ■ Unlimited functionality as all standard AFM cantilevers can be used. ■ Supports all common AFM operating modes. ■ Automatic alignment of the laser/detector during cantilever replacement. ■ Existing Auriga SEM can be upgraded to BRR functionality with a simple door replacement. *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Semilab is a comprehensive measurement device manufacturer that supports research and manufacturing of cutting-edge technologies worldwide. We handle non-contact CV measurement devices, lifetime measurement devices, spectroscopic ellipsometers, photoluminescence, DLTS systems, sheet resistance measurement devices, nanoindenters, AFM, and more for the inspection of semiconductor wafers and devices. Please feel free to contact us for specifications and pricing of our devices.