Measurement of various semiconductor carrier transport characteristics is possible! Non-contact mobility measurement using microwave reflection!
For the manufacturing of semiconductor devices, carrier mobility is a very important parameter. The "LEI-1610 Series" is a non-contact mobility measurement device capable of measuring various semiconductor carrier transport characteristics such as mobility, carrier concentration, and sheet resistance. Carrier mobility, sheet resistance, and sheet charge density can be measured non-contact and destructively on Si wafers ranging from 2 inches to a maximum of 8 inches, as well as on compound semiconductor (GaAs, GaN, InP, etc.) epi wafers. 【Features】 ■ Non-contact mobility measurement using microwave reflection ■ Standard measurement device for high-frequency device characteristics ■ High correlation with measurement results from the Hall effect ■ Multi-carrier modeling option *For more details, please refer to the related link page or feel free to contact us.
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【Other Features】 ■ Non-destructive, non-contact ■ No sample pretreatment required ■ High-speed feedback ■ Automatic mapping measurement ■ Complies with ASTM F76 standards ■ Significant time savings compared to conventional measurement methods ■ No electrode formation required ■ Allows anyone to easily achieve reproducible measurements on wafers that are actually mass-produced ■ Measurement possible even with the cap layer intact, thanks to magnetic field control and software processing *For more details, please refer to the related links page or feel free to contact us.
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Semilab is a comprehensive measurement device manufacturer that supports research and manufacturing of cutting-edge technologies worldwide. We handle non-contact CV measurement devices, lifetime measurement devices, spectroscopic ellipsometers, photoluminescence, DLTS systems, sheet resistance measurement devices, nanoindenters, AFM, and more for the inspection of semiconductor wafers and devices. Please feel free to contact us for specifications and pricing of our devices.
