Simulation software "PEGASUS"

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last updated：Sep 28, 2020

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Simulation software for engineers using vacuum technology, plasma technology, thin film technology, and microfabrication technology!

"PEGASUS" is a simulation software for engineers involved in the development and manufacturing using vacuum technology in equipment manufacturers, material manufacturers, and device manufacturers. It consists of multiple modules with different functions, and by combining one or more modules, simulations can be performed according to customer requirements. It targets a wide range of industries and fields, including IT, space development, energy, and semiconductors. Please feel free to contact us if you have any inquiries. 【Features】 ■ Simulation software for engineers involved in the development and manufacturing using vacuum technology in equipment manufacturers, material manufacturers, and device manufacturers. ■ Capable of performing simulations related to many processes required in vacuum thin film technology. ■ Able to conduct simulations from gas phase simulations of equipment sizes to substrate surface simulations at the micron size, among others. *For more details, please download the PDF or feel free to contact us.

Related Link - http://www.psinc.co.jp/products/

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basic information

【Target Industries and Fields】 ■IT: Optical fibers, optical waveguide devices ■Space Development: Space chambers, solar cells ■Energy: Fuel cells, solar power generation ■Semiconductors: Low and high dielectric materials, silicon, compound semiconductors ■Electronics: LCD, PDP, organic EL, displays, optical discs, etc. ■Food/Beverage: Corrosion-resistant, low oxygen permeability membrane packaging ■Metals: Surface modification, DLC, hardening, metal processing ■Ceramics: Fine ceramics ■Automotive: Car electronics, mirrors, headlights ■New Materials: Carbon nanotubes ■Optics: Various coatings, lighting ■MEMS: Biochips, μTAS *For more details, please download the PDF or feel free to contact us.*

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Applications/Examples of results

【Applications】 ■ Dilute Gas Device Simulation - Behavior of dilute gases and viscous flow in various vacuum devices and vacuum pumps - Carrier gas flow and film thickness distribution in vacuum deposition devices ■ Radiation and Heat Conduction Simulation - Incident heat flux distribution and temperature distribution of structures within various vacuum devices ■ Plasma Device Simulation - Behavior of parent gas, charged particles, excited species, and radicals in PECVD/etching devices - Plasma behavior and sputtered particle behavior in magnetron sputtering devices ■ Discharge Phenomenon Simulation - Magnetron/holocathode/surface discharge - Behavior of charged particle beams - Plasma source ion implantation - Plasma source surface modification - Microplasma ■ Shape Simulation - Microfabrication shapes in PVD/PECVD/etching ■ Dilute Gas Simulation - Behavior of nanoparticles in dilute gases - Atomic and molecular behavior in fine regions - Vacuum pumping *For more details, please download the PDF or feel free to contact us.