Surface Shape Simulation Module (FPSM3D)

The initial shape is a trench, which can be provided in a hole! A module for calculating the time-dependent changes of the substrate and deposited film.

The "Surface Shape Simulation Module (FPSM3D)" is a module that calculates the temporal changes of the substrate and deposited film by considering various reactions on the substrate surface using the particle Monte Carlo method. It does not use the sharp interfaces characteristic of the cell method, but determines the incident angle based on the gradient of the solid layer occupancy, applying it to the angle-dependent specular reflection probability and reaction probability. It can accommodate any type of reaction, including PVD, plasma CVD, and etching. 【Features】 ■ Uses the particle Monte Carlo method to express shapes considering solid layer occupancy and surface coverage through the cell method. ■ There are no restrictions on the number of gas species, reaction equations, complexes, and polymers. ■ Defined on a three-dimensional orthogonal mesh, but the initial shape can be provided as trenches or holes. ■ Incident particle information can be obtained from the output of the PEGASUS gas phase module and PEGASUS surface science module, or specified by the user using the input methods provided by this product. ■ Reaction equations are defined by the user, and the specular reflection probability and reaction probability use functions that depend on the incident angle and incident energy. *For more details, please refer to the PDF materials or feel free to contact us.

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